MEMS microphone
AssigneeAac Acoustic Technologies (Shenzhen) Co., Ltd.
InventorsZhenkui Meng, Zhengyan Liu
Life of this patent
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Abstract
A MEMS microphone, includes: a base with a back cavity; and an electric capacitance system arranged on the base. The electric capacitance system includes a back plate, a first diaphragm opposite to and arranged on one side of the back plate, and a second diaphragm arranged on the other side of the back plate. The first diaphragm and the second diaphragm keeps a distance from the back plate for forming a first insulation gap and a second insulation gap respectively. The back plate includes a plurality of through holes; the first diaphragm and the second diaphragm are circular. The MEMS microphone further includes a first support piece between the first diaphragm and the second diaphragm through the through holes. Thus, the two diaphragms are not easy to adhere to the back plate.
Claims7
A MEMS microphone, including:
- a base with a back cavity;
- an electric capacitance system arranged on the base, the electric capacitance system including a back plate, a first diaphragm opposite to and arranged on one side of the back plate, and a second diaphragm arranged on the other side of the back plate;
- the first diaphragm and the second diaphragm being keeping a distance from the back plate for forming a first insulation gap and a second insulation gap respectively;
- wherein
- the back plate includes a plurality of through holes;
- the first diaphragm and the second diaphragm are circular;
- the MEMS microphone further includes a first support piece arranged between the first diaphragm and the second diaphragm through the through holes, one end of the first support piece is connected to the center of the first diaphragm, and the other end is connected to the circle center of the second diaphragm.
Dependencies are inferred from the claim text.