Piezoelectric microphone
AssigneeAac Acoustic Technologies (Shenzhen) Co., Ltd.
InventorsLian Duan, Rui Zhang
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Abstract
The present application provides a piezoelectric microphone including a substrate having a back cavity and a piezoelectric cantilever diaphragm fixed to the substrate, the piezoelectric cantilever diaphragm includes a fixed end fixedly connected to the substrate and a movable end connected to the fixed end and suspended above the back cavity, the piezoelectric microphone further includes a support back plate, the support back plate includes a support arm opposite to and spaced apart from the movable end of the piezoelectric cantilever diaphragm and a fixing arm that fixes the support arm. The piezoelectric microphone of the present disclosure has better stability compared to the related art.
Claims9
A piezoelectric microphone, comprising:
- a substrate having a back cavity;
- a piezoelectric cantilever diaphragm fixed to the substrate, the piezoelectric cantilever diaphragm comprising a fixed end fixedly connected to the substrate and a movable end connected to the fixed end and suspended above the back cavity;
- and
- one or more support back plates, each of the one or more support back plates comprising a support arm opposite to and spaced apart from the movable end of the piezoelectric cantilever diaphragm and a fixing arm that fixes the support arm,
- the piezoelectric cantilever diaphragm comprising a plurality of diaphragm flaps of a same size, every two adjacent diaphragm flaps of the plurality of diaphragm flaps spaced apart from each other, and each of the plurality of diaphragm flaps comprising the fixed end fixedly connected to the substrate and the movable end opposite to the fixed end.
Dependencies are inferred from the claim text.