Tool and method of fabricating a self-aligned solid state thin film battery

A solid state electrochemical battery fabrication device, comprising:

• a first chamber comprising a first magnetron;
• a second chamber comprising a second magnetron, coupled to the first chamber;
• a third chamber comprising a vapor source for a polymer deposition, coupled to the second chamber;
• a Knudsen cell coupled to the third chamber and configured to deposit lithium on a battery being fabricated;
• a hollow shaft configured to connect the first, second, and third chambers, and provide a hermetic seal between the first, second, and third chambers;
• and
• a first telescopic arm having a housing coupled to a first end of the hollow shaft and configured to extend out of its housing from the first chamber to the second chamber, wherein:
• the first magnetron is a direct current (DC) sputtering gun,
• the first chamber further comprises a first collimator coupled between the first magnetron and the battery being fabricated, and
• the first collimator together with the first telescopic arm, are configured to provide a two-dimensional control of a deposition angle of particles of the first magnetron.