Semiconductor device and semiconductor memory device
AssigneeToshiba Memory Corporation
InventorsTakashi Izumida, Takeshi Shimane, Tadayoshi Uechi
Life of this patent
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Abstract
A semiconductor device according to an embodiment includes a semiconductor layer having a first plane and a second plane opposite to the first plane; a gate electrode; a gate insulating layer provided between the first plane and the gate electrode; and a pair of first p-type impurity regions provided in the semiconductor layer on both sides of the gate electrode, containing boron, carbon, and germanium, having a bond structure of boron and carbon, having a first boron concentration and a first depth in a direction from the first plane toward the second plane, and having a distance between the first p-type impurity regions being a first distance.
Claims8
A semiconductor device comprising:
- a semiconductor layer having a first face and a second face opposite to the first face;
- a gate electrode;
- a gate insulating layer provided between the first face and the gate electrode;
- a pair of first p-type impurity regions provided in the semiconductor layer on both sides of the gate electrode, the first p-type impurity regions containing boron, carbon, and germanium, the first p-type impurity regions having a bond structure of boron and carbon, the first p-type impurity regions having a first boron concentration and a first depth in a direction from the first face toward the second face, the first p-type impurity regions having a distance between the first p-type impurity regions being a first distance, and each of the first p-type impurity regions including a portion having a carbon concentration higher than a germanium concentration;
- and
- a pair of second p-type impurity regions provided in the semiconductor layer on both sides of the gate electrode, the second p-type impurity regions containing boron, the second p-type impurity regions having a second boron concentration lower than the first boron concentration, the second p-type impurity regions having a second depth smaller than the first depth in the direction from the first face toward the second face, the second p-type impurity regions having a distance between the second p-type impurity regions being a second distance shorter than the first distance, and the second p-type impurity regions having a germanium concentration lower than the germanium concentration of the first p-type impurity regions.
Dependencies are inferred from the claim text.