Semiconductor device and method for fabricating the same
AssigneeUnited Microelectronics Corp.
InventorsChih-Wei Kuo, Tai-Cheng Hou, Yu-Tsung Lai, Jiunn-Hsiung Liao
Life of this patent
Estimating the term…
Abstract
A method for fabricating semiconductor device includes the steps of: forming a first magnetic tunneling junction (MTJ) and a second MTJ on a substrate; forming a first top electrode on the first MTJ and a second top electrode on the second MTJ; forming a passivation layer on the first MTJ and the second MTJ; removing part of the passivation layer so that a top surface of all of the remaining passivation layer is lower than a top surface of the first electrode; and forming a ultra low-k (ULK) dielectric layer on the first MTJ and the second MTJ.
Claims1
A semiconductor device, comprising:
- a first magnetic tunneling junction (MTJ) and a second MTJ on a substrate;
- a first top electrode on the first MTJ and a second top electrode on the second MTJ;
- a cap layer on top surfaces of the first top electrode and the second electrode and sidewalls of the first MTJ and the second MTJ;
- a passivation layer between the first MTJ and the second MTJ and on the cap layer, wherein a top surface of the passivation layer comprises a V-shape;
- and
- an ultra low-k (ULK) dielectric layer on and directly contacting the cap layer and the passivation layer and around the first MTJ and the second MTJ.
Dependencies are inferred from the claim text.