Semiconductor memory device including vertical barrier
AssigneeSK hynix Inc.
InventorJae Taek Kim
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AssigneeSK hynix Inc.
InventorJae Taek Kim
Estimating the term…
A semiconductor memory device includes a dummy stack structure having a first stack structure and a second stack structure formed on the first stack structure. The semiconductor memory device also includes a cell stack structure surrounding the dummy stack structure. The semiconductor memory device further includes a vertical barrier disposed at a boundary between the cell stack structure and the dummy stack structure, the vertical barrier including a first part formed on a sidewall of the first stack structure and a second part formed on a sidewall of the second stack structure. A sectional area of the first part of the vertical barrier is greater than a sectional area of the second part of the vertical barrier at a height at which a boundary between the first stack structure and the second stack structure is disposed.
A semiconductor memory device comprising:
A semiconductor memory device comprising:
Dependencies are inferred from the claim text.