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US 11,056,500 B2Granted
Semiconductor memory device
AssigneeSK hynix Inc.
InventorJae Taek Kim
Life of this patent
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Abstract
A semiconductor memory device includes a dielectric stack structure, and capacitor electrodes disposed in the dielectric stack structure.
Claims20
A semiconductor memory device comprising:
- a lower structure including a first region and a second region;
- a gate stack structure including interlayer insulating layers and conductive patterns, which are alternately stacked in a vertical direction on the first region of the lower structure;
- a channel structure penetrating the gate stack structure;
- a dielectric stack structure including first material layers and second material layers, which are alternately stacked in the vertical direction on the second region of the lower structure;
- and
- capacitor electrodes disposed in the dielectric stack structure, the capacitor electrodes extending substantially in parallel to the channel structure,
- wherein the capacitor electrodes include:
- first capacitor electrodes connected to a first electrode line to which a first voltage is applied;
- and
- second capacitor electrodes connected to a second electrode line to which a second voltage lower than the first voltage is applied.
7 more elements
A semiconductor memory device comprising:
- a first dielectric stack structure including first dummy insulating layers and first sacrificial insulating layers, which are alternately stacked in a vertical direction;
- a second dielectric stack structure including second dummy insulating layers and the second sacrificial insulating layers, which are alternately stacked in the vertical direction on the first dielectric stack structure;
- and
- capacitor electrodes extending in the vertical direction to penetrate the second dielectric stack,
- wherein the capacitor electrodes include:
- first capacitor electrodes connected to a first electrode line to which a first voltage is applied;
- and
- second capacitor electrodes connected to a second electrode line to which a second voltage lower than the first voltage is applied.
5 more elements
Dependencies are inferred from the claim text.