Optical chip ID definition using nanoimprint lithography
AssigneeInternational Business Machines Corporation
InventorDaniel Piper
Life of this patent
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Abstract
An optically readable chip ID is provided to an imprintable material that is formed as a last level of an integrated circuit (IC) chip using nanoimprint lithography. The nanoimprint lithography process provides an array of indentations into the imprintable material that is typically arranged in a hexadecimal pattern. The hexadecimal pattern includes one or more optically readable characters which combine to encode chip location identification data. The chip location identification data identifies a unique location of the product chip on a wafer prior to dicing.
Claims14
A semiconductor device comprising:
- an imprinted material as a last level of an integrated circuit chip and containing indentations disposed therein, wherein the indentations in the imprinted material collectively form a code containing numbers, alphabetic letters or numbers and alphabetic letters, and the code is an optically readable ID.
A semiconductor device comprising:
- an imprinted material as a last level of an integrated circuit chip and containing an optically readable ID disposed therein, and wherein the optically readable ID comprises indentations present in the imprinted material that provide a hexadecimal pattern to the imprinted material.
Dependencies are inferred from the claim text.