Semiconductor microcooler
AssigneeInternational Business Machines Corporation
InventorsDonald F. Canaperi, Daniel A. Corliss, Dario Goldfarb, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka
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AssigneeInternational Business Machines Corporation
InventorsDonald F. Canaperi, Daniel A. Corliss, Dario Goldfarb, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka
Estimating the term…
A stacked semiconductor microcooler includes a first and second semiconductor microcooler. Each microcooler includes silicon fins extending from a silicon substrate. A metal layer may be formed upon the fins. The microcoolers may be positioned such that the fins of each microcooler are aligned. One or more microcoolers may be thermally connected to a surface of a coolant conduit that is thermally connected to an electronic device heat generating device, such as an integrated circuit (IC) chip, or the like. Heat from the electronic device heat generating device may transfer to the one or more microcoolers. A flow of cooled liquid may be introduced through the conduit and heat from the one or more microcoolers may transfer to the liquid coolant.
A heat transfer method comprising:
An electronic system comprising:
A stacked semiconductor microcooler system comprising:
Dependencies are inferred from the claim text.