Semiconductor package and manufacturing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShih-Hao Tseng, Hung-Jui Kuo, Ming-Che Ho, Chia-Hung Liu
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShih-Hao Tseng, Hung-Jui Kuo, Ming-Che Ho, Chia-Hung Liu
Estimating the term…
A semiconductor package includes an encapsulated semiconductor device, a redistribution structure, and a protection layer. The encapsulated semiconductor device includes a semiconductor device and an encapsulating material encapsulating the semiconductor device. The redistribution structure is disposed on the encapsulated semiconductor device and includes a dielectric layer and a redistribution circuit layer electrically connected to the semiconductor device. The protection layer at least covers the dielectric layer, wherein an oxygen permeability or a water vapor permeability of the protection layer is substantially lower than an oxygen permeability or a vapor permeability of the dielectric layer.
A semiconductor package, comprising:
A semiconductor package, comprising:
A semiconductor package, comprising:
Dependencies are inferred from the claim text.