Composite material and a semiconductor container made of the same
AssigneeGudeng Precision Industrial Co., Ltd.
InventorsJyun-Yan Jiang, Ming-Chien Chiu
Life of this patent
Estimating the term…
Abstract
The present invention provides a semiconductor container which is made of composite material. The composite material is selected from a group consisting of a graphene material doped cycloolefin copolymer (COC), a graphene material doped cycloolefin polymer (COP) and a graphene material doped cyclic block copolymer (CBC). The content of the graphene material ranges from 0.6% to 8.0% by weight in each composite material.
Claims15
A semiconductor container made of composite material, comprising:
- a cycloolefin material is selected from a group consisting of a graphene material doped cycloolefin copolymer (COC) and a graphene material doped cycloolefin polymer (COP);
- wherein the graphene material having a weight percent range from 0.6%-8.0%;
- wherein the graphene material comprises graphene nanoplatelets, graphene oxide or combination thereof;
- wherein the semiconductor container made of composite material is substrate container or reticle container.
A composite material is selected from a group consisting of a graphene material doped cycloolefin copolymer (COC) and a graphene material doped cycloolefin polymer (COP);
- wherein the graphene material having a weight percent range from 0.6%-8.0%;
- wherein the graphene material comprises graphene nanoplatelets, graphene oxide or combination thereof.
Dependencies are inferred from the claim text.