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US 11,056,372 B2Granted
Low temperature biasable substrate support
AssigneeApplied Materials, Inc.
InventorsBrian T. West, Soundarrajan Jembulingam, Dinkesh Huderi Somanna
Life of this patent
Estimating the term…
Abstract
Embodiments described herein relate to a substrate support and techniques for controlling a temperature of the same. The substrate support includes a heating element and an over temperature switch disposed therein. The heating element heats the substrate support and a substrate disposed thereon. The over temperature switch controls a temperature of the heating element and the substrate support. The over temperature switch is operable to switch states in response to a temperature of the substrate support exceeding a predefined temperature.
Claims18
A substrate support comprising:
- a chuck body having a heating element;
- a cooling plate having a first surface and a second surface opposite the first surface, the first surface disposed adjacent to the chuck body;
- a recess formed in the second surface of the cooling plate;
- and
- an over temperature switch disposed in the substrate support and operable to switch states in response to detecting a temperature which exceeds a predefined temperature.
2 more elements
A substrate support comprising:
- a chuck body having a heating element;
- an over temperature switch disposed in the substrate support and operable to switch states in response to detecting a temperature which exceeds a predefined temperature;
- a cooling plate having a first surface and a second surface opposite the first surface, the first surface disposed adjacent to the chuck body;
- an opening formed through the cooling plate;
- an electrical insulator disposed in through the opening, the electrical insulator comprising:
- a first hole having a first power lead extending therethrough and coupled to an electrode disposed in the chuck body;
- a second hole having a second power lead extending therethrough and coupled to the electrode;
- a third hole having a third power lead extending therethrough and coupled to a heater disposed in the chuck body;
- a fourth hole having a fourth power lead extending therethrough and coupled to the heater;
- a fifth hole having an inlet tube extending therethrough and coupled to the cooling plate;
- a sixth hole having an outlet tube extending therethrough and coupled to the cooling plate;
- a first groove formed into a surface of the electrical insulator opposite the chuck body, the first groove having a first low voltage lead extending therethrough and coupled to a control circuit;
- and
- a second groove formed into the surface of the electrical insulator opposite the chuck body, the second groove having a second low voltage lead extending therethrough and coupled to the control circuit.
11 more elements
A substrate support comprising:
- a chuck body having a heating element;
- an over temperature switch disposed in the substrate support and operable to switch states in response to detecting a temperature which exceeds a predefined temperature;
- control circuitry configured to open a power supply circuit providing power to the chuck body in response to the over temperature switch changing to an open state;
- a low voltage circuit portion coupled to the over temperature switch;
- and
- a high voltage switch configured to open the power supply circuit in response to a signal from the low voltage circuit portion indicative of the over temperature switch being in the open state.
3 more elements
A substrate support comprising:
- a chuck body having a heating element disposed therein;
- a cooling plate having a first surface and a second surface opposite the first surface, the first surface disposed adjacent to the chuck body;
- a recess formed in the second surface of the cooling plate;
- an opening formed through the cooling plate;
- a central insulator disposed in the opening;
- an over temperature switch disposed in the recess and operable to switch states in response to the cooling plate exceeding a predefined temperature;
- and
- an electrical insulator disposed between the recess and the over temperature switch.
5 more elements
A substrate support comprising:
- a chuck body;
- a cooling plate having a first surface and a second surface opposite the first surface, the first surface disposed adjacent to the chuck body;
- a recess formed in the second surface of the cooling plate;
- an opening formed through the cooling plate;
- a central insulator disposed in the opening;
- an over temperature switch disposed in the recess and operable to switch states in response to the cooling plate exceeding a predefined temperature;
- one or more grooves formed in the central insulator;
- one or more low voltage cables coupled to the over temperature switch and at least partially disposed in the grooves;
- and
- an electrical insulator disposed between the recess and the over temperature switch.
7 more elements
Dependencies are inferred from the claim text.