Fault detection method in semiconductor fabrication facility

A method for fault detection in a fabrication facility, comprising:

• moving a transferring member in the fabrication facility;
• measuring the humidity at a plurality of selected locations using a metrology tool positioned on the transferring member and recording a location of the metrology tool;
• comparing the humidity measured at one of the selected locations with an expected humidity associated with the one of the selected locations;
• based on the comparison, indicating an alarm condition which is indicative of a chemical leakage when the difference between the measured humidity and the expected humidity exceeds a range of acceptable values associated with the one of the selected locations, and determining a component that is a source of the chemical leakage;
• collecting data associated with humidity at each of the selected locations in a previous movement of the transferring member;
• and
• storing data associated with humidity in the previous movement of the transferring member in an archive database, wherein the expected humidity is derived from the archive database.

A fabrication facility, comprising:

• a transferring member movable in different locations;
• a metrology tool positioned on the transferring member;
• and
• a fault detection and classification system configured to:
• receive humidity measurements associated with humidity at a plurality of selected locations from the metrology tool;
• compare one of the humidity measurements associated with one of the selected locations with an expected humidity associated with the same location;
• collect data associated with humidity at each of the selected locations in a previous movement of the transferring member;
• store data associated with humidity in the previous movement of the transferring member in an archive database, wherein the expected humidity is derived from the archive database;
• and
• indicate an alarm condition which is indicative of a chemical leakage when the difference between the measured humidity and the expected humidity exceeds a range of acceptable values, and determine a component that is a source of the chemical leakage based on the comparison.