Substrate liquid processing apparatus and method, and computer-redable storage medium stored with substrate liquid processing program

A non-transitory computer-readable recording medium that stores a computer-executable program for a liquid processing of a substrate using a substrate liquid processing apparatus including a liquid processing chamber configured to process a substrate with a processing liquid, a processing liquid supply configured to supply the processing liquid, and a diluent supply configured to supply a diluent for diluting the processing liquid,

• wherein, when executed, the program causes a computer to:
• acquire a concentration of the processing liquid and an atmospheric pressure from a concentration detector and an atmospheric pressure detector,
• compare an acquired atmospheric pressure to a set atmospheric pressure;
• correct a set concentration to a saturation concentration corresponding to a boiling point of the processing liquid at the acquired atmospheric pressure when the acquired atmospheric pressure falls outside the set atmospheric pressure;
• and
• boil the processing liquid to a predetermined temperature so as to supply the processing liquid to the substrate at the saturation concentration at the predetermined temperature and to process the substrate.