Cleaning apparatus and substrate processing apparatus
AssigneeEbara Corporation
InventorsTeruaki Hombo, Junji Kunisawa
Life of this patent
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Abstract
A cleaning apparatus includes a plurality of processing units including a cleaning unit which cleans a processing object, a transport chamber provided between the plurality of processing units, a transport robot provided inside the transport chamber so as to be movable vertically, an exhaust port portion which discharges gas compressed, when the transport robot descends, from a lower portion of the transport chamber, and a liquid remaining unit which causes liquid transported to the compressed gas to remain in the lower portion of the transport chamber.
Claims12
A cleaning apparatus, comprising:
- a plurality of processing units comprising a cleaning unit which cleans a processing object;
- a transport chamber provided between the plurality of processing units;
- a transport robot provided inside the transport chamber so as to be movable vertically;
- an exhaust port portion which discharges gas compressed, when the transport robot descends, from a lower portion of the transport chamber;
- and
- a liquid remaining unit which causes liquid transported to the compressed gas to remain in the lower portion of the transport chamber,
- wherein the exhaust port portion opens on a bottom surface of the transport chamber,
- wherein the liquid remaining unit comprises a jetty of a projecting shape provided upright between the bottom surface of the transport chamber and the exhaust port portion and a roof of a recessed shape facing the jetty with a gap therebetween, and
- wherein the roof is inclined downward from the exhaust port portion toward the bottom surface of the transport chamber.
A cleaning apparatus, comprising:
- a plurality of processing units comprising a cleaning unit which cleans a processing object;
- a transport chamber provided between the plurality of processing units;
- a transport robot provided inside the transport chamber so as to be movable vertically;
- an exhaust port portion which discharges gas compressed, when the transport robot descends, from a lower portion of the transport chamber;
- and
- a liquid remaining unit which causes liquid transported to the compressed gas to remain in the lower portion of the transport chamber,
- wherein the exhaust port portion opens on a bottom surface of the transport chamber,
- wherein the liquid remaining unit comprises a jetty of a projecting shape provided upright between the bottom surface of the transport chamber and the exhaust port portion and a roof of a recessed shape facing the jetty with a gap therebetween, and
- wherein the roof has a gap adjuster which adjusts a size of the gap from the jetty.
A cleaning apparatus, comprising:
- a plurality of processing units comprising a cleaning unit which cleans a processing object;
- a transport chamber provided between the plurality of processing units;
- a transport robot provided inside the transport chamber so as to be movable vertically;
- an exhaust port portion which discharges gas compressed, when the transport robot descends, from a lower portion of the transport chamber;
- a liquid remaining unit which causes liquid transported to the compressed gas to remain in the lower portion of the transport chamber;
- and
- a transport chamber interior cleaner which cleans an inside of the transport chamber,
- wherein the transport chamber interior cleaner has a nozzle comprising a jetting-out port portion which opens toward a side wall surface of the transport chamber and which is capable of jetting out liquid toward the side wall surface of the transport chamber.
Dependencies are inferred from the claim text.