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US 11,056,357 B2Granted
Substrate processing apparatus and substrate processing apparatus assembling method
AssigneeTokyo Electron Limited
InventorsMikio Nakashima, Katsuya Koga
Life of this patent
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Abstract
A substrate processing system includes multiple assemblies framed and including such that each of the assemblies includes a substrate processing apparatus which supplies a processing fluid to a substrate and processes the substrate, a fluid supply control apparatus including a fluid control device which controls flow of the processing fluid supplied to the substrate processing apparatus, and a drive equipment apparatus including a drive device which drives movement of the fluid control device in the fluid supply control apparatus.
Claims20
A substrate processing system, comprising:
- a plurality of assemblies framed and comprising such that each of the assemblies comprises a substrate processing apparatus configured to supply a processing fluid to a substrate and process the substrate, a fluid supply control apparatus comprising a fluid control device configured to control flow of the processing fluid supplied to the substrate processing apparatus, and a drive equipment apparatus comprising a drive device configured to drive the fluid control device in the fluid supply control apparatus,
- wherein the substrate processing apparatus has a chamber and a bottom plate comprising a holding portion configured to engage with the fluid supply control apparatus and hold the fluid supply control apparatus on the bottom plate of the substrate processing apparatus such that the fluid control device is connected to the substrate processing apparatus and dedicated to control the flow of the processing fluid supplied to the substrate processing apparatus in a respective one of the assemblies, the drive equipment apparatus is encased independently from the substrate processing apparatus and the fluid supply control apparatus such that the drive equipment apparatus is configured to be mounted directly on the chamber of the substrate processing apparatus and that the drive device is connected to the fluid control device in the fluid supply control apparatus and dedicated to drive the fluid control device in the fluid supply control apparatus in the respective one of the assemblies, and the drive equipment apparatus comprises a first drive equipment box configured to be connected to the fluid supply control apparatus and a second drive equipment box configured to be connected to the fluid supply control apparatus and mounted to the first drive equipment box such that the first and second drive equipment boxes are configured to be mounted on the chamber of the substrate processing apparatus.
A method for assembling a substrate processing system, comprising:
- forming a plurality of assemblies such that each of the assemblies comprises a substrate processing apparatus configured to supply a processing fluid to a substrate and process the substrate, a fluid supply control apparatus comprising a fluid control device configured to control flow of the processing fluid supplied to the substrate processing apparatus, and a drive equipment apparatus comprising a drive device configured to drive the fluid control device in the fluid supply control apparatus;
- connecting, to each of the assemblies, a test equipment device configured to control operation of each of the assemblies such that each of the assemblies is inspected;
- and
- assembling the plurality of assemblies inspected by the test equipment device onto a frame structure such that a substrate processing system comprising the plurality of assemblies is assembled,
- wherein the substrate processing apparatus has a chamber and a bottom plate comprising a holding portion configured to engage with the fluid supply control apparatus and hold the fluid supply control apparatus on the bottom plate of the substrate processing apparatus such that the fluid control device is connected to the substrate processing apparatus and dedicated to control the flow of the processing fluid supplied to the substrate processing apparatus in a respective one of the assemblies, the drive equipment apparatus is encased independently from the substrate processing apparatus and the fluid supply control apparatus such that the drive equipment apparatus is configured to be mounted directly on the chamber of the substrate processing apparatus and that the drive device is connected to the fluid control device in the fluid supply control apparatus and dedicated to drive the fluid control device in the fluid supply control apparatus in the respective one of the assemblies, and the drive equipment apparatus comprises a first drive equipment box configured to be connected to the fluid supply control apparatus and a second drive equipment box configured to be connected to the fluid supply control apparatus and mounted to the first drive equipment box such that the first and second drive equipment boxes are configured to be mounted on the chamber of the substrate processing apparatus.
2 more elements
Dependencies are inferred from the claim text.