Semiconductor separation device
AssigneeLumentum Technology UK Limited
InventorsIan David Juland, Douglas Ritchie, Graeme Harris
Life of this patent
Estimating the term…
Abstract
Described is a semiconductor substrate stack, including: a plurality of semiconductor substrates arranged in a stack in which the semiconductor substrates include opposing facing surfaces, wherein the facing surfaces of adjacent semiconductor substrates are separated by a gap, each semiconductor substrate having an edge surface at an exposed edge of the stack. A spacer is attached to one of the facing surfaces of each of the at least one of the semiconductor substrates and extends between adjacent semiconductor substrates to define the gap and mask a central portion of each respective semiconductor substrate.
Claims20
A semiconductor substrate stack, comprising:
- a plurality of semiconductor substrates arranged in a stack in which opposing facing surfaces of adjacent semiconductor substrates, of the plurality of semiconductor substrates, are separated by a gap,
- each semiconductor substrate, of the plurality of semiconductor substrates, having an edge surface at an exposed edge of the stack;
- and
- a spacer attached to one of the opposing facing surfaces of each of the plurality of semiconductor substrates and extending between the adjacent semiconductor substrates to define the gap and mask a central portion of each respective semiconductor substrate, of the plurality of semiconductor substrates.
A semiconductor substrate stack, comprising:
- a first semiconductor substrate that includes a plurality of first dies arranged across a facing surface of the first semiconductor substrate and defined by a die line;
- and
- a second semiconductor substrate that includes a plurality of second dies arranged across a second surface that is opposite the facing surface of the first semiconductor substrate,
- wherein each of the plurality first dies comprises at least one semiconductor device and a spacer, and
- wherein the spacer extends between the first semiconductor substrate and the second semiconductor substrate to define a gap and mask a central portion of the first semiconductor substrate and the second semiconductor substrate.
A semiconductor device substrate comprising:
- a substrate comprising at least one semiconductor device,
- wherein the substrate includes:
- a spacer masking a central portion of the substrate and arranged to define a gap between the substrate and an adjacent substrate, and
- a surface of the substrate to which the spacer is attached, and
- wherein an edge region of the substrate includes at least one layer of deposited material, the deposited material being bounded by the spacer.
Dependencies are inferred from the claim text.