Retaining ring having inner surfaces with facets
AssigneeApplied Materials, Inc.
InventorsJeonghoon Oh, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate
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Abstract
A retaining ring comprises a generally annular body. The body comprises a top surface, a bottom surface, an outer surface connected to the top surface at an outer top perimeter and the bottom surface at an outer bottom perimeter, and an inner surface connected to the top surface at an inner top perimeter and the bottom surface at an inner bottom perimeter. The inner surface comprises seven or more planar facets. Adjacent planar facets are connected at corners. The inner bottom perimeter comprises straight edges of the planar facets connected at the corners.
Claims14
A chemical mechanical polishing system, comprising:
- a platen supporting a polishing pad;
- a carrier head to hold a substrate against the polishing pad, the carrier head including
- a carrier body,
- a substrate receiving surface,
- a generally annular retaining ring surrounding the substrate receiving surface, the retaining ring comprising
- a top surface detachably secured to the carrier body,
- a bottom surface formed of a material suitable for contacting the polishing pad,
- an outer surface connected to the top surface at an outer top perimeter and the bottom surface at an outer bottom perimeter;
- and
- an inner surface connected to the top surface at an inner top perimeter and the bottom surface at an inner bottom perimeter, the inner surface comprising 12 to 148 planar facets, adjacent planar facets being connected at corners, and the inner bottom perimeter comprising straight edges of the planar facets, the straight edges of the adjacent planar facets connected at the corners such that the inner bottom perimeter defines a polygon.
Dependencies are inferred from the claim text.