Back to results
US 11,056,343 B2Granted
Providing a temporary protective layer on a graphene sheet
AssigneeCardea Bio, Inc.
InventorsDeng Pan, Brett Goldsmith
Life of this patent
Estimating the term…
Abstract
Embodiments of the disclosed technology include patterning a graphene sheet for biosensor and electronic applications using lithographic patterning techniques. More specifically, the present disclosure is directed towards the method of patterning a graphene sheet with a hard mask metal layer. The hard mask metal layer may include an inert metal, which may protect the graphene sheet from being contaminated or damaged during the patterning process.
Claims20
A method for providing a temporary layer on a graphene sheet comprising:
- transferring a graphene sheet to a selected wafer;
- depositing a gold layer to a first surface of the graphene sheet by dipping the graphene sheet in a gold plating solution;
- patterning the graphene sheet by etching away areas of the gold layer and the graphene sheet corresponding to areas patterned in a photoresist layer using a lithography process;
- packaging the patterned graphene sheet and temporary protective portions of the gold layer not etched away during the patterning of the graphene sheet into a graphene-based device, wherein the packaging comprises epoxy curing;
- and
- removing, after packaging the graphene-based device, the temporary protective portions of gold layer by exposing the gold layer deposited to the surface of the graphene sheet to a non-acidic solution comprising potassium iodide.
3 more elements
A method for providing a temporary layer on a graphene sheet comprising:
- transferring a graphene sheet to a selected wafer;
- depositing a metal layer forming the temporary layer on the graphene sheet;
- patterning the graphene;
- packaging the patterned graphene sheet and the metal layer into a graphene-based device, wherein the packaging comprises epoxy curing;
- removing, after packaging the graphene-based device, the metal layer from the graphene sheet, wherein the metal layer comprises gold, ruthenium, silver, iridium;
- and
- wherein removing the metal layer comprises exposing the graphene sheet to a non-acidic solution.
4 more elements
A bio-sensor chip comprising:
- a graphene-based device with a patterned graphene portion protected from contamination or damage during packaging and assembly of the graphene-based device by a temporary protective metal layer that is removed from the patterned graphene portion after the packaging and the assembly of the graphene-based device;
- and
- one or more bottom electrodes spaced apart and disposed directly under the patterned graphene portion;
- wherein the graphene-based device is manufactured according to the following process steps:
- transferring a graphene sheet to a selected wafer;
- depositing a gold layer to a first surface of the graphene sheet by dipping the graphene sheet in a gold plating solution;
- patterning the graphene sheet by etching away areas of the gold layer and the graphene sheet corresponding to areas patterned in a photoresist layer using a lithography process;
- packaging the patterned graphene sheet and portions of the gold layer not etched away during the pattering of the graphene sheet into a graphene-based device, wherein the packaging comprises epoxy curing;
- and
- removing, after packaging the graphene-based device, the gold layer by exposing the graphene sheet to a non-acidic solution.
7 more elements
Dependencies are inferred from the claim text.