Back to results
US 11,056,326 B2Granted
Sintered non-porous cathode and sputter ion vacuum pump containing the same
AssigneeSaes Getters S.P.A.
InventorsTommaso Porcelli, Fabrizio Siviero, Alessandro Gallitognotta
Life of this patent
Estimating the term…
Abstract
The present invention relates to cathodes electrodes compositions suitable to provide a pumping mechanism which exhibits an extremely high pumping speed and capacity of noble gas suitable to be used in several vacuum devices as for example sputter ion vacuum pumping systems comprising them as active element.
Claims20
A cathode comprising:
- a molded sintered bulk mixture of a powder of a first metal M1;
- a powder of a second metal M2, which is different from M1;
- and
- optionally, a powder of one or more metallic elements, which are different from M1 and M2;
- wherein
- the powders M1, M2 and one or more metallic elements different from M1 and M2 are homogeneously distributed in the sintered bulk mixture,
- the molded sintered bulk mixture is nonporous,
- a content of the one or more metallic elements is less than 3 atonic %, based on a total number of atoms Q of the sintered bulk mixture,
- wherein M1 and M2 are each independently selected from a group consisting of titanium (Ti), tantalum (Ta), zirconium (Zr), niobium (Nb), hafnium (Hf), a rare earth metal, nickel (Ni), and molybdenum (Mo), and
- wherein M1 and M2 have a mean atomic mass W in a range of 80 to 160 amu according to the formula
- W=W1*q1+W2*q2
- wherein M1 has an atomic mass W1 in an amount q1 expressed as an atomic percent of the total number of atoms Q of the sintered bulk mixture and M2 has atomic mass W2 in an amount q2 expressed as an atomic percent of the total number of atoms Q.
9 more elements
Dependencies are inferred from the claim text.