Multi-inlet gas distributor for chemical vapor deposition coating of TRISO particles
AssigneeX-energy, LLC
InventorsHoward Kim, Peter J. Pappano
Life of this patent
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Abstract
A multi-inlet gas distributor for a fluidized bed chemical vapor deposition reactor that may include a distributor body having an inlet surface, an exit surface opposed to the inlet surface, and a side perimeter surface. The distributor body may also include multiple-inlets evenly spaced from each other, wherein the multiple-inlets penetrate the distributor body from the inlet surface to a first depth. The distributor body may additionally include cone-shaped apertures connecting to corresponding ones of the multiple-inlets at the first depth and extend from the first depth toward the exit surface. An apex may be formed on the exit surface at the intersection of the cone-shaped apertures.
Claims19
A multi-inlet gas distributor for a fluidized bed chemical vapor deposition chamber, comprising:
- a distributor body having an inlet surface, an exit surface opposed to the inlet surface, and a side perimeter surface extending between and connecting the inlet surface to the exit surface;
- multiple-inlets evenly spaced from each other, wherein the multiple-inlets penetrate the distributor body from the inlet surface to a first depth;
- and
- cone-shaped apertures connecting to corresponding ones of the multiple-inlets at the first depth and extend from the first depth toward the exit surface, wherein an apex is formed on the exit surface at an intersection of the cone-shaped apertures, and a saddle is formed with an arch-shaped edge along the exit surface at an intersection of at least one of the cone-shaped apertures with the side perimeter surface.
A fluidized bed chemical vapor deposition reactor, comprising:
- a fluidized bed chamber configured to hold fluidizing gas/vapor;
- and
- a multi-inlet gas distributor coupled to the fluidized bed chamber, wherein the multi-inlet gas distributor includes:
- a distributor body having an inlet surface, an exit surface opposed to the inlet surface, and a side perimeter surface extending between and connecting the inlet surface to the exit surface;
- multiple-inlets evenly spaced from each other, wherein the multiple-inlets penetrate the distributor body from the inlet surface to a first depth;
- and
- cone-shaped apertures connecting to corresponding ones of the multiple-inlets at the first depth and extend from the first depth toward the exit surface, wherein an apex is formed on the exit surface at an intersection of the cone-shaped apertures, and a saddle is formed with an arch-shaped edge along the exit surface at an intersection of at least one of the cone-shaped apertures with the side perimeter surface,
- wherein the multi-inlet gas distributor is configured to receive the fluidizing gas/vapor through the multiple-inlets and inject the fluidizing gas/vapor through the cone-shaped apertures and into the fluidized bed chamber.
Dependencies are inferred from the claim text.