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US 11,052,637 B2Granted
Structure containing Sn layer or Sn alloy layer
AssigneeIshihara Chemical Co., Ltd.
InventorsShoya Iuchi, Masaru Hatabe, Takahiro Tanaka, Fuka Yamaoka
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Abstract
A structure containing a Sn layer or a Sn alloy layer includes a substrate, a Sn layer or Sn alloy layer formed above the substrate, and an under barrier metal formed between the substrate and the Sn layer or Sn alloy layer in the form of a single metal layer containing any one of Fe, Co, Ru and Pd, or an alloy layer containing two or more of Fe, Co, Ru and Pd.
Claims1
A structure including a Sn layer or a Sn alloy layer, comprising:
- a substrate;
- the Sn layer or the Sn alloy layer formed above the substrate;
- and
- an under barrier metal formed between the substrate and the Sn layer or the Sn alloy layer,
- wherein the under barrier metal consist of a Fe—Co alloy,
- wherein the under barrier metal contains Fe in a mass ratio of 70% or more.
3 more elements
Dependencies are inferred from the claim text.