Functional membrane for ion beam transmission, beam line device and filter device each having the same, and method of adjusting filter device

A beam line device comprising:

• a vacuum chamber in which an ion beam passes;
• a functional membrane for ion beam transmission a plurality of channels, the functional membrane having a thickness sufficient for charge state distribution of incident ion to maintain an equilibrium state, and the functional membrane being disposed in the vacuum chamber;
• and
• a positioning stage attached with the functional membrane and configured to adjust a position of the functional membrane,
• wherein
• the functional membrane is made of crystal,
• the plurality of channels extend along a crystallographic axis of the crystal, and
• the positioning stage is configured to adjust the position of the functional membrane such that the functional membrane is disposed in the beam line of the ion beam and channel axes of the plurality of channels of the functional membrane are substantially parallel to the traveling direction of the ion beam, so as to place the functional membrane in an ion channeling state.

A filter device that removes an unwanted particle contained in an ion beam traveling in a vacuum chamber, the filter device comprising:

• a vacuum chamber in which an ion beam passes;
• a functional membrane for ion beam transmission comprising a plurality of channels, the functional membrane having a thickness sufficient for charge state distribution of incident ion to maintain an equilibrium state, and the functional membrane being disposed in the vacuum chamber;
• and
• a positioning stage attached with the functional membrane and configured to adjust a position of the functional membrane,
• wherein
• the functional membrane is made of crystal,
• the plurality of channels extend along a crystallographic axis of the crystal, and
• the positioning stage is configured to adjust the position of the functional membrane such that the functional membrane is disposed in the beam line of the ion beam and that channel axes of the plurality of channels of the functional membrane are substantially parallel to a traveling direction of the ion beam, so as to place the functional membrane in an ion channeling state.

A method for adjusting a filter device including:

• a vacuum chamber in which an ion beam passes;
• a functional membrane for ion beam transmission disposed in the vacuum chamber, the functional membrane comprising a plurality of channels, the functional membrane being made of crystal, and the plurality of channels extending along a crystallographic axis of the crystal;
• a positioning stage attached with the functional membrane and configured to adjust a position of the functional membrane;
• a Faraday cup disposed downstream of the positioning stage and configured to capture the ion beam;
• and
• a current measuring part that measures current based on the ion beam captured by the Faraday cup,
• the method comprising:
• a step of adjusting the position of the positioning stage such that the functional membrane is disposed in a beam line, so that channel axes of the plurality of channels of the functional membrane are substantially parallel to a travel direction of the ion beam to place the functional membrane in an ion channeling state and that the current measured by the current measuring part becomes maximum.

A method for adjusting a filter device including:

• a vacuum chamber in which an ion beam passes;
• a functional membrane for ion beam transmission having a channel and disposed in the vacuum chamber;
• a positioning stage attached with the functional membrane for ion beam transmission and configured to adjust a position of the functional membrane for ion beam transmission;
• a Faraday cup disposed downstream of the positioning stage and configured to capture the ion beam;
• and
• a current measuring part that measures current based on the ion beam captured by the Faraday cup,
• the method comprising:
• a first step of adjusting the position of the positioning stage such that the ion beam passes through a position at which the functional membrane for ion beam transmission is absent and that the current measured by the current measuring part becomes maximum;
• and
• a second step of adjusting, after the first step, the position of the positioning stage such that the functional membrane for ion beam transmission is disposed in a beam line and that the current measured by the current measuring part becomes maximum.