Inspection device and detector
AssigneeHitachi High-Tech Corporation
InventorShunichi Matsumoto
Life of this patent
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Abstract
An inspection device has an illuminating optical system for forming an illuminated area on a sample, a converging optical system for converging the light from the sample, and a detector for detecting the light converged by the converging optical system. The converging optical system includes an image forming element that includes a lens group that has divided apertures and is configured so as to form a plurality of images. The detector detects a signal for the images formed by the image forming element. The detector has a plurality of partitions disposed in a matrix, the partitions include first and second pixels, and the images are projected onto the partitions.
Claims13
An inspection device comprising:
- an illuminating optical system for forming an illuminated area having a longitudinal direction on a sample;
- a detecting optical system for converging light from the sample;
- and
- a detector having an arrangement of partitions each including at least a first photodetector element and a second photodetector element,
- wherein
- the detecting optical system is disposed such that an optical axis thereof is inclined with respect to a direction of a normal line of a surface of the sample,
- the detecting optical system is a reducing optical system having an imaging magnification of less than 1,
- the detecting optical system includes an image forming element including a lens group, the lens group having divided apertures and being configured to form a plurality of images of the illuminated area on the detector, and
- each of the plurality of images formed on the detector is formed across the first photodetector element and the second photodetector element.
Dependencies are inferred from the claim text.