Highly stretchable three-dimensional percolated conductive nano-network structure, method of manufacturing the same, strain sensor including the same and wearable device including the same

A method of manufacturing a highly stretchable three-dimensional (3D) percolated conductive nano-network structure, the method comprising:

• forming a 3D nano-structured porous elastomer including patterns distributed in a periodic network;
• changing a surface of the 3D nano-structured porous elastomer to a hydrophilic state;
• conformally adhering a polymeric material on the surface of the 3D nano-structured porous elastomer;
• wetting the surface of the 3D nano-structured porous elastomer by infiltrating a conductive solution in which a conductive material is dispersed;
• and
• forming a 3D percolated conductive nano-network coupled with the 3D nano-structured porous elastomer by evaporating a solvent of the conductive solution and removing the polymeric material,
• wherein forming the 3D nano-structured porous elastomer includes:
• forming a photoresist layer on a substrate;
• forming a photoresist pattern having a porous structure by patterning the photoresist layer;
• infiltrating a liquid elastomer using the photoresist pattern as a template;
• performing a post-treatment on the liquid elastomer;
• and
• obtaining the 3D nano-structured porous elastomer by removing the photoresist pattern.