Pyroelectric detection device with stressed suspended membrane
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsGwenael Le Rhun, Stephane Fanget
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Abstract
Pyroelectric detection device, comprising at least: a suspended membrane; a pyroelectric detection element located on the suspended membrane and comprising at least one portion of pyroelectric material located between first and second electrodes, the first electrode being located between said at least one portion of pyroelectric material and the suspended membrane; and in which the membrane and the pyroelectric detection element are subjected to a higher compression stress than a limiting buckling stress of the suspended membrane and the pyroelectric detection element and together form a bistable structure.
Claims14
Pyroelectric detection device, comprising at least:
- a suspended membrane;
- a pyroelectric detection element located on the suspended membrane and comprising at least one portion of pyroelectric material located between first and second electrodes, the first electrode being located between said at least one portion of pyroelectric material and the suspended membrane;
- and in which the suspended membrane and the pyroelectric detection element are subjected to a higher compression stress than a limiting buckling stress of the suspended membrane and the pyroelectric detection element and together form a bistable structure.
Method of fabricating a pyroelectric detection device, comprising at least:
- fabrication of a suspended membrane;
- fabrication of a pyroelectric detection element located on the suspended membrane and comprising at least one portion of pyroelectric material located between first and second electrodes, the first electrode being located between said at least one portion of pyroelectric material and the suspended membrane;
- and in which the suspended membrane and the pyroelectric detection element are subjected to a higher compression stress than a limiting buckling stress of the suspended membrane and the pyroelectric detection element and together form a bistable structure.
Dependencies are inferred from the claim text.