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US 11,035,709 B2Granted
CMOS thermal fluid flow sensing device employing a flow sensor and a pressure sensor on a single membrane
AssigneeCambridge Enterprise Limited
InventorsAndrea De Luca, Florin Udrea
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Abstract
A CMOS-based sensing device includes a substrate including an etched portion and a first region located on the substrate. The first region includes a membrane region formed over an area of the etched portion of the substrate, a flow sensor formed within the membrane region and a pressure sensor formed within the membrane region.
Claims19
A CMOS-based sensing device comprising:
- a substrate comprising an etched portion;
- a first region located on the substrate, wherein the first region comprises a first membrane region formed over an area of the etched portion of the substrate;
- a flow sensor formed within the first membrane region, the flow sensor being a temperature sensing device;
- and
- a pressure sensor formed within said first membrane region,
- wherein the flow sensor and the pressure sensor are located completely within the first membrane region.
3 more elements
Dependencies are inferred from the claim text.