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US 11,031,514 B2Granted
Solar cell with selectively doped conductive oxide layer and method of making the same
AssigneeVitro, S.A.B. de C.V.
InventorsJames W. McCamy, Peter Tausch, Gary J. Nelis, Ashtosh Ganjoo
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Abstract
A method of making a coated substrate having a transparent conductive oxide layer with a dopant selectively distributed in the layer includes selectively supplying an oxide precursor material and a dopant precursor material to each coating cell of a multi-cell chemical vapor deposition coater, wherein the amount of dopant material supplied is selected to vary the dopant content versus coating depth in the resultant coating.
Claims6
A solar cell comprising
- a first substrate having a first surface and a second surface;
- a first conductive layer over at least a portion of the second surface, the first conductive layer comprising zinc stannate doped with a dopant having a non-uniform profile, wherein the first conductive layer comprises a first portion having a dopant, a second portion over the first portion having an amount of dopant, the amount of dopant being less than an amount of dopant in the first portion, a third portion over the second portion having more dopant than the amount of dopant in the second portion and less dopant than the first portion;
- a fourth portion having less dopant than the first, second, and third portion;
- and a fifth portion having less dopant than the first and third portions and more dopant than the second and fourth portions;
- a semiconductor layer over the first conductive layer;
- and
- a second conductive layer over at least a portion of the semiconductor layer.
4 more elements
Dependencies are inferred from the claim text.