# US 11,030,036 B2 · Equipment failure risk detection and prediction in industrial process > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,030,036 B2 - Document ID: US11030036B2 - Status: Granted - Kind: B2 - Application number: 16/665,027 - Filed: 2019-10-28 - Published: 2020-02-20 - Granted: 2021-06-08 - Earliest claimed: 2016-05-25 - Assignees: International Business Machines Corporation - Applicants: International Business Machines Corporation - Inventors: Young M. Lee; Nizar Lethif - Web page: https://patentgrep.com/patent/US11030036B2 ## CPC - G06F 11/0793: {Remedial or corrective actions (recovery from an exception in an instruction pipeline G06F9/3861; by retry G06F11/1402; for recovering from a failure of a protocol instance or entity H04L69/40)} - G05B 23/00: Testing or monitoring of control systems or parts thereof (monitoring of program-control systems G05B19/048, G05B19/406) - G05B 23/0294: {Optimizing process, e.g. process efficiency, product quality} - G06F 11/008: {Reliability or availability analysis} - G06F 11/079: {Root cause analysis, i.e. error or fault diagnosis (in a hardware test environment G06F11/22; in a software test environment G06F11/36)} - G06F 11/3058: {Monitoring arrangements for monitoring environmental properties or parameters of the computing system or of the computing system component, e.g. monitoring of power, currents, temperature, humidity, position, vibrations (thermal management in cooling arrangements of a computing system G06F1/206)} - H04L 41/0604: using filtering, e.g. reduction of information by using priority, element types, position or time - H04L 41/0654: using network fault recovery (ring fault isolation or reconfiguration in loop networks without recovery actions by a network management system H04L12/437) - H04L 41/147: for predicting network behaviour - G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N) - G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables G05D; systems for regulating electric or magnetic variables G05F; control devices or systems insofar as characterised by mechanical features only G05G) - H04L: TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION (arrangements common to telegraphic and telephonic communication H04M) ## Abstract Detecting equipment failure risk in industrial process may include distributing equipment operations data to a cluster of nodes based on a range of time and operation specified in maintenance data associated with the equipment. From a record entry in the maintenance data, an operation, installation and maintenance time may be determined. A plurality of nodes storing equipment operations data associated with the operation during a time range between the installation and the maintenance time are selected. Operation features may be determined by distributed processing operation in the plurality of nodes. The operation features are aggregated and added as an entry in a target table. Equipment failure risk is detected by risk failure analysis performed based on the target table. A signal may be sent to automatically adjust or correct one or more operation features. ## Claims ### Claim 1 A computer-implemented method of detecting equipment failure risk in an industrial process, the method performed by at least one hardware processor, comprising: determining from a cluster of nodes, a plurality of nodes storing equipment operations data associated with an operation performed by an equipment during a time range between an installation time and a maintenance time of the equipment; constructing a target table based on aggregated operation features determined from the plurality of nodes configured to execute a distributed processing operation in parallel, the distributed processing operation computing operation features associated with the equipment; and performing a risk failure analysis of an instance of the equipment based on the aggregated operation features stored in the target table, wherein the determining is performed for multiple entries in parallel as distributed parallel processing. ### Claim 2 (depends on 1) The method of claim 1, wherein the distributed processing operation comprises a map operation performed by each of the plurality of nodes, the map operation computing at least an average, minimum, maximum and standard deviation associated with temperature, pressure and power associated with the equipment during the operation, and the aggregated operation features are determined by a reduce operation that aggregates at least the average, minimum, maximum and standard deviation computed in the plurality of nodes associated with at least temperature, pressure and power associated with the equipment during the operation. ### Claim 3 (depends on 1) The method of claim 1, wherein the target table is constructed by adding the aggregated operation features computed for each of the multiple entries. ### Claim 4 (depends on 1) The method of claim 1, wherein the equipment comprises a plurality of electrostatic chucks installed in a plurality of semiconductor fabricating chambers. ### Claim 5 (depends on 1) The method of claim 1, wherein the industrial process comprises a semiconductor manufacturing process. ### Claim 6 (depends on 1) The method of claim 1, further comprising: sending an alert signal based on the risk failure analysis to an operations controller. ### Claim 7 A computer program product comprising a computer readable storage medium having program instructions embodied therewith, the program instructions executable by a device to cause the device to: determine from a cluster of nodes, a plurality of nodes storing equipment operations data associated with an operation performed by an equipment during a time range between an installation time and a maintenance time of the equipment; constructing a target table based on aggregated operation features determined from the plurality of nodes configured to execute a distributed processing operation in parallel, the distributed processing operation computing operation features associated with the equipment; and performing a risk failure analysis of an instance of the equipment based on the aggregated operation features stored in the target table, wherein the device is caused to determine from the cluster of nodes, the plurality of nodes storing the equipment operations data associated with the operation performed by the equipment during the time range between the installation time and the maintenance time, for multiple entries in parallel as distributed parallel processing. ### Claim 8 (depends on 7) The computer program product of claim 7, wherein the distributed processing operation comprises a map operation performed by each of the plurality of nodes, the map operation computing at least an average, minimum, maximum and standard deviation associated with temperature, pressure and power associated with the equipment during the operation, and the aggregated operation features are determined by a reduce operation that aggregates at least the average, minimum, maximum and standard deviation computed in the plurality of nodes associated with at least temperature, pressure and power associated with the equipment during the operation. ### Claim 9 (depends on 7) The computer program product of claim 7, wherein the target table is constructed by adding the aggregated operation features computed for each of the multiple entries. ### Claim 10 (depends on 7) The computer program product of claim 7, wherein the equipment comprises a plurality of electrostatic chucks installed in a plurality of semiconductor fabricating chambers. ### Claim 11 (depends on 10) The computer program product of claim 10, wherein the industrial process comprises a semiconductor manufacturing process, wherein the device is further caused to adjust an operating condition associated with the equipment running in the industrial process including automatically adjusting at least one of temperature and pressure in at least one of the plurality of semiconductor fabricating chambers. ### Claim 12 (depends on 7) The computer program product of claim 7, wherein the industrial process comprises a semiconductor manufacturing process. ### Claim 13 (depends on 7) The computer program product of claim 7, wherein the device is further caused to send a signal based on the risk failure analysis to an operations controller. ### Claim 14 A system of detecting equipment failure risk in an industrial process, comprising: at least one hardware processor communicatively coupled to a cluster of nodes storing a distributed file system; the at least one hardware processor operable to determine from the cluster of nodes, a plurality of nodes storing equipment operations data associated with an operation performed by an equipment during a time range between the installation time and the maintenance time of the equipment; the at least one hardware processor further operable to construct a target table based on aggregated operation features determined from the plurality of nodes configured to execute a distributed processing operation in parallel, the distributed processing operation computing operation features associated with the equipment; the at least one hardware processor further operable to perform a risk failure analysis of an instance of the equipment based on the aggregated operation features stored in the target table, wherein the at least one hardware processor determines from the cluster of nodes, the plurality of nodes storing the equipment operations data associated with the operation performed by the equipment during the time range between the installation time and the maintenance time, for multiple entries in parallel as distributed parallel processing. ### Claim 15 (depends on 14) The system of claim 14, wherein the distributed processing operation comprises a map operation performed by each of the plurality of nodes, the map operation computing at least an average, minimum, maximum and standard deviation associated with temperature, pressure and power associated with the equipment during the operation, wherein the aggregated operation features are determined by a reduce operation operable to aggregate at least the average, minimum, maximum and standard deviation computed in the plurality of nodes associated with at least temperature, pressure and power associated with the equipment during the operation. ### Claim 16 (depends on 14) The system of claim 14, wherein the the target table is constructed by adding the aggregated operation features computed for each of the multiple entries. ### Claim 17 (depends on 14) The system of claim 14, wherein the equipment comprises a plurality of electrostatic chucks installed in a plurality of semiconductor fabricating chambers. ### Claim 18 (depends on 14) The system of claim 14, wherein the industrial process comprises a semiconductor manufacturing process. ### Claim 19 (depends on 14) The system of claim 14, wherein the at least one hardware processor is further operable to send a signal based on the risk failure analysis to an operations controller. ### Claim 20 (depends on 14) The system of claim 14, wherein the equipment comprises a plurality of electrostatic chucks installed in a plurality of semiconductor fabricating chambers, and wherein the industrial process comprises a semiconductor manufacturing process, wherein the at least one hardware processor is further operable to cause adjusting of an operating condition associated with the equipment running in the industrial process.