# US 11,029,612 B2 · Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,029,612 B2 - Document ID: US11029612B2 - Status: Granted - Kind: B2 - Application number: 16/494,200 - Filed: 2018-02-15 - Published: 2020-02-13 - Granted: 2021-06-08 - Earliest claimed: 2017-03-16 - Assignees: ASML Netherlands B.V. - Applicants: Asml Netherlands B.V. - Inventors: Maarten Hartger Kimman; Hans Butler; Olof Martinus Josephus Fischer; Christiaan Alexander Hoogendam; Theodorus Mattheus Joannus Maria Huizinga; Johannes Marinus Maria Rovers; Eric Pierre-Yves Vennat; Maurice Willem Jozef Etienne Wijckmans - Web page: https://patentgrep.com/patent/US11029612B2 ## CPC - G03F 7/70816: {Bearings} - F16C 39/063: {Permanent magnets} - G03F 7/70758: {Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving} - G03F 7/70825: {Mounting of individual elements, e.g. mounts, holders or supports (workpiece or mask holders G03F7/707)} - G03F 7/70833: {Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground} - G03F 7/709: {Vibration, e.g. vibration detection, compensation, suppression or isolation} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - F16C: SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS ## Abstract The invention relates to a bearing device arranged to support in a vertical direction a first part of an apparatus with respect to a second part of the apparatus, comprising a magnetic gravity compensator. The magnetic gravity compensator comprises: a first permanent magnet assembly mounted to one of the first part and the second part and comprising at least a first column of permanent magnets, the first column extending in the vertical direction, wherein the permanent magnets have a polarization direction in a first horizontal direction or in a second horizontal direction opposite to the first horizontal direction, wherein vertically adjacent permanent magnets have opposite polarization directions, a second permanent magnet assembly mounted to the other of the first part and the second part and comprising at least one other column of permanent magnets, the at least one other column extending in the vertical direction, wherein vertically adjacent permanent magnets of the at least one other column have opposite polarization directions in the first horizontal direction or the second horizontal direction, wherein the first permanent magnet assembly at least partially encloses the second permanent magnet assembly. ## Claims ### Claim 1 A bearing device arranged to support in a vertical direction a first part of an apparatus with respect to a second part of the apparatus, the bearing device comprising a magnetic gravity compensator, wherein the magnetic gravity compensator comprises: a first permanent magnet assembly mounted to one of the first part and the second part and comprising at least a first column of permanent magnets, the first column extending in a vertical direction, wherein the permanent magnets have a polarization direction in a first horizontal direction or in a second horizontal direction opposite to the first horizontal direction, wherein vertically adjacent permanent magnets have opposite polarization directions, and a second permanent magnet assembly mounted to the other of the first part and the second part and comprising at least one other column of permanent magnets, the at least one other column extending in the vertical direction, wherein vertically adjacent permanent magnets of the at least one other column have opposite polarization directions in the first horizontal direction or the second horizontal direction, wherein: the first permanent magnet assembly at least partially encloses the second permanent magnet assembly; the first part comprises a sensor frame; and the second part comprises an intermediate frame configured to: support the sensor frame; and be supported by a base frame; and the magnetic gravity compensator is configured to have a negative stiffness based on a combination of absolute control and relative control of an actuator. ### Claim 2 (depends on 1) The bearing device of claim 1, wherein the first permanent magnet assembly comprises the first column of permanent magnets and a second column of permanent magnets, the second column extending in the vertical direction, parallel to the first column of permanent magnets, wherein the permanent magnets of the second column have a polarization direction in the first horizontal direction or in the second horizontal direction, wherein vertically adjacent permanent magnets of the second column have opposite polarization directions, and wherein permanent magnets of the first column and the second column arranged at the same height have the same polarization direction, and wherein the at least one other column of permanent magnets comprises a third column of permanent magnets, the third column extending in the vertical direction, wherein the third column is arranged, at least partly, between the first column and the second column, wherein vertically adjacent permanent magnets of the third column have opposite polarization directions in the first horizontal direction or the second horizontal direction. ### Claim 3 (depends on 1) The bearing device of claim 1, wherein a pitch between vertically adjacent permanent magnets of the first column and the at least one other column is the same for each column, and wherein the at least one other column is arranged in a vertical position with respect to the first column and the at least one other column shifted over a distance substantially corresponding to a half of the pitch. ### Claim 4 (depends on 1) The bearing device of claim 1, wherein the bearing device further comprises an actuator device arranged to provide an additional vertical force between the first part and the second part of the apparatus. ### Claim 5 (depends on 4) The bearing device of claim 4, wherein the bearing device comprises: a first sensor arranged to provide a first measurement signal representative of a relative distance between the first part of the apparatus and the second part of the apparatus, a second sensor arranged to provide a second measurement signal representative of an acceleration of the first part of the apparatus, and a controller arranged to provide an actuator signal to drive the actuator device at least partially on the basis of the first measurement signal and the second measurement signal. ### Claim 6 (depends on 4) The bearing device of claim 4, wherein the actuator is configured to damp motion of the first part. ### Claim 7 (depends on 4) The bearing device of claim 4, wherein the actuator is configured to damp motion of the second part. ### Claim 8 (depends on 4) The bearing device of claim 4, wherein the actuator is configured to stabilize the bearing device. ### Claim 9 (depends on 4) The bearing device of claim 4, wherein the actuator is configured to adjust a position of the one of the first part and the second part supported by the bearing device. ### Claim 10 (depends on 1) The bearing device of claim 1, wherein the bearing device comprises a mechanical spring between the first part and the second part of the apparatus. ### Claim 11 (depends on 1) The bearing device of claim 1, wherein the bearing device is constructed as a vibration isolation system between the first part and the second part of the apparatus. ### Claim 12 (depends on 1) The bearing device of claim 1, wherein the permanent magnets of the first column have an annular shape, wherein the first horizontal direction is radially inwards of the annular shape and the second horizontal direction is radially outwards of the annular shape, wherein the permanent magnets of the other column have an annular shape, wherein the first horizontal direction is radially inwards of the annular shape and the second horizontal direction is radially outwards of the annular shape, and wherein an inner diameter of the permanent magnets of the first column is larger than an outer diameter of the permanent magnets of the at least one other column, and the at least one other column is at least partially arranged within the first column. ### Claim 13 (depends on 1) The bearing device of claim 1, wherein the permanent magnets of the second permanent magnet assembly having the same polarization direction as the permanent magnets of the first permanent magnet assembly are in a shifted position of approximately a half pitch in a vertical upwards direction when the first permanent magnet assembly is mounted to the first part and the second permanent magnet assembly is mounted to the second part, and the permanent magnets of the second permanent magnet assembly having the same polarization direction as the permanent magnets of the first permanent magnet assembly are in a shifted position of approximately a half pitch in a vertical downwards direction when the first permanent magnet assembly is mounted to the second part and the second permanent magnet assembly is mounted to the first part. ### Claim 14 A magnetic gravity compensator, comprising: a first permanent magnet assembly mounted to one of a first part and a second part and comprising at least a first column of permanent magnets, the first column extending in a vertical direction, wherein the permanent magnets have a polarization direction in a first horizontal direction or in a second horizontal direction opposite to the first horizontal direction, wherein vertically adjacent permanent magnets have opposite polarization directions; and a second permanent magnet assembly mounted to the other of the first part and the second part and comprising at least one other column of permanent magnets, the at least one other column extending in the vertical direction, wherein vertically adjacent permanent magnets of the at least one other column have opposite polarization directions in the first horizontal direction or the second horizontal direction, wherein: the first permanent magnet assembly at least partially encloses the second permanent magnet assembly; the first part comprises a sensor frame; and the second part comprises an intermediate frame configured to: support the sensor frame; and be supported by a base frame; and the magnetic gravity compensator is configured to have a negative stiffness based on a combination of absolute control and relative control of an actuator. ### Claim 15 A lithographic apparatus comprising: a support constructed to support a patterning device, the patterning device being capable of imparting to the radiation beam a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate; a projection system configured to project the patterned radiation beam onto a target portion of the substrate; and a bearing device arranged to support in a vertical direction a first part of the lithographic apparatus with respect to a second part of the lithographic apparatus, wherein: the bearing device comprises a magnetic gravity compensator; the magnetic gravity compensator comprises: a first permanent magnet assembly mounted to one of the first part and the second part and comprising at least a first column of permanent magnets, the first column extending in a vertical direction, wherein the permanent magnets have a polarization direction in a first horizontal direction or in a second horizontal direction opposite to the first horizontal direction, wherein vertically adjacent permanent magnets have opposite polarization directions, and a second permanent magnet assembly mounted to the other of the first part and the second part and comprising at least one other column of permanent magnets, the at least one other column extending in the vertical direction, wherein vertically adjacent permanent magnets of the at least one other column have opposite polarization directions in the first horizontal direction or the second horizontal direction; the first permanent magnet assembly at least partially encloses the second permanent magnet assembly; the first part comprises a sensor frame; and the second part comprises an intermediate frame configured to: support the sensor frame; and be supported by a base frame; and the magnetic gravity compensator is configured to have a negative stiffness based on a combination of absolute control and relative control of an actuator. ### Claim 16 (depends on 15) The lithographic apparatus of claim 15, wherein the bearing device is arranged in a vacuum space of the lithographic apparatus. ### Claim 17 A method to control a gravity compensator having a negative stiffness, and arranged between a first part of an apparatus and a second part of the apparatus, comprising: generating, by a first sensor, a first measurement signal representative of a relative distance between the first part of the apparatus and the second part of the apparatus; generating, by a second sensor, a second measurement signal representative of an acceleration of the first part of the apparatus; receiving, by a first sub-controller of a controller, the first measurement signal; receiving, by a second sub-controller of the controller, the second measurement signal; generating, by the controller, an actuator signal to drive an actuator device arranged between the first part of the apparatus and the second part of the apparatus on the basis of the first measurement signal and the second measurement signal, wherein the gravity compensator is configured to have the negative stiffness based on a combination of absolute control and relative control of the actuator device; using a sensor frame for the first part; and using an intermediate frame for the second part, the intermediate frame configured to: support the sensor frame; and be supported by a base frame. ### Claim 18 A vibration isolation system comprising a bearing device arranged to support in a vertical direction a first part of an apparatus with respect to a second part of the apparatus, the bearing device comprising a magnetic gravity compensator, wherein the magnetic gravity compensator comprises: a first permanent magnet assembly mounted to one of the first part and the second part and comprising at least a first column of permanent magnets, the first column extending in a vertical direction, wherein the permanent magnets have a polarization direction in a first horizontal direction or in a second horizontal direction opposite to the first horizontal direction, wherein vertically adjacent permanent magnets have opposite polarization directions, and a second permanent magnet assembly mounted to the other of the first part and the second part and comprising at least one other column of permanent magnets, the at least one other column extending in the vertical direction, wherein vertically adjacent permanent magnets of the at least one other column have opposite polarization directions in the first horizontal direction or the second horizontal direction, wherein: the first permanent magnet assembly at least partially encloses the second permanent magnet assembly; the first part comprises a sensor frame; and the second part comprises an intermediate frame configured to: support the sensor frame; and be supported by a base frame; and the magnetic gravity compensator is configured to have a negative stiffness based on a combination of absolute control and relative control of an actuator.