# US 11,029,603 B2 · Chemical replacement system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,029,603 B2 - Document ID: US11029603B2 - Status: Granted - Kind: B2 - Application number: 16/226,139 - Filed: 2018-12-19 - Published: 2020-04-02 - Granted: 2021-06-08 - Earliest claimed: 2018-09-28 - Assignees: Taiwan Semiconductor Manufacturing Company, Ltd. - Applicants: Taiwan Semiconductor Manufacturing Co., Ltd. - Inventors: Yu Kai Chen; Forster Yuan; Ko-Bin Kao; Shi-Ming Wang; Su-Yu Yeh; Li-Jen Wu; Oliver Yu - Web page: https://patentgrep.com/patent/US11029603B2 ## CPC - G03F 7/164: {using electric, electrostatic or magnetic means; powder coating} - H10P 72/0618: {using identification means, e.g. labels on substrates or labels on containers} - B25J 5/007: {mounted on wheels} - B25J 9/1669: {characterised by special application, e.g. multi-arm co-operation, assembly, grasping} - B25J 9/1679: {characterised by the tasks executed} - G03F 7/16: Coating processes; Apparatus therefor (applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74) - G06K 19/0723: {the record carrier comprising an arrangement for non-contact communication, e.g. wireless communication circuits on transponder cards, non-contact smart cards or RFIDs} - H10P 72/0448: {Apparatus for applying a liquid, a resin, an ink or the like} - H10P 72/0604: {Process monitoring, e.g. flow or thickness monitoring} - H10P 72/3214: {by means of a cart or a vehicle} - G03F 7/0012: {Processes making use of the tackiness of the photolithographic materials, e.g. for mounting; Packaging for photolithographic material; Packages obtained by processing photolithographic materials} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50}) - G06K: GRAPHICAL DATA READING (image or video recognition or understanding G06V); PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS ## Abstract Embodiments of the present disclosure describe a chemical replacement system and a method to automatically replace PR bottles. The chemical replacement system includes a computer system and a transfer module. The computer system can receive a request signal to replace one or more chemical containers and transmit a command to the transfer module. The transfer module, being controlled by the computer system, can include a holder configured to hold the one or more chemical containers (e.g., PR bottles); a door unit configured to open in response to the command; and a transfer unit configured to eject the holder in response to the command for replacement. The chemical replacement system can further include an automated vehicle configured to replace the one or more chemical containers in the ejected holder. ## Claims ### Claim 1 A chemical replacement system, comprising: a computer system configured to: receive a request signal to replace one or more chemical containers; and transmit a command based on the request signal; and a transfer module comprising: a holder configured to hold the one or more chemical containers; a door unit configured to open in response to the command; a transfer unit configured to eject the holder in response to the command; and an anti-collision sensor configured to scan and detect one or more objects surrounding the door unit. ### Claim 2 (depends on 1) The chemical replacement system of claim 1, wherein the holder comprises a radio frequency identification (RFID) reader, each of the one or more chemical containers comprises an RFID tag, and wherein the RFID reader and the RFID tag are configured to pair the holder to at least one of the one or more chemical containers. ### Claim 3 (depends on 1) The chemical replacement system of claim 1, wherein the transfer module comprises a motor configured to drive the opening of the door unit and the ejection of the holder. ### Claim 4 (depends on 1) The chemical replacement system of claim 1, further comprising: a hose configured to deliver a chemical from at least one of the one or more chemical containers to a chemical dispensing system; and an automatic winding device configured to wind the hose. ### Claim 5 (depends on 1) The chemical replacement system of claim 1, wherein the holder comprises three placement sensor structures. ### Claim 6 (depends on 5) The chemical replacement system of claim 5, wherein each placement sensor structure can include a sensor pin, a sensor bracket, a spring, and a photo interrupter. ### Claim 7 (depends on 1) The chemical replacement system of claim 1, further comprising an identification (ID) sensing device configured to receive the request signal to replace the chemical container from an automated vehicle configured to hold a replacement chemical container. ### Claim 8 (depends on 7) The chemical replacement system of claim 7, wherein the ID sensing device comprises a radio frequency identification (RFID) reader. ### Claim 9 (depends on 7) The chemical replacement system of claim 7, wherein the automated vehicle comprises: a vehicle body configured to hold the replacement chemical container; a plurality of wheels configured to move the automated vehicle from one location to another location; and a robotic arm configured to load and unload the replacement chemical container. ### Claim 10 A photoresist (PR) replacement system, comprising: an automated vehicle configured to hold and transport a PR bottle; a computer system configured to: receive a request signal to replace the PR bottle; and transmit a command based on the request signal; and a transfer module comprising a holder and a transfer unit, wherein the holder comprises a placement sensor structure configured to optically determine a placement of the PR bottle in the holder, and wherein the transfer module is configured to: hold the PR bottle in the holder; and eject the holder using the transfer unit. ### Claim 11 (depends on 10) The PR replacement system of claim 10, wherein the automated vehicle comprises: a vehicle body configured to hold the PR bottle; a plurality of wheels configured to transport the PR bottle; and a robotic arm configured to load and unload the PR bottle. ### Claim 12 (depends on 10) The PR replacement system of claim 10, wherein the placement sensor structure comprises a photo interrupter. ### Claim 13 (depends on 10) The PR replacement system of claim 10, further comprising an identification (ID) sensing device configured to detect an ID tag on the automated vehicle. ### Claim 14 (depends on 13) The PR replacement system of claim 13, wherein the ID sensing device comprises an radio frequency identification (RFID) reader and the ID tag comprises an RFID tag. ### Claim 15 A method for replacing a photoresist (PR) bottle using a chemical replacement system, comprising: receiving a request signal for replacing the PR bottle in a holder; transmitting, via a communication network, a command to a transfer module; scanning and detecting objects surrounding a door unit associated with the holder to avoid collision; ejecting, with the transfer module, the holder; and replacing the PR bottle in the holder with another PR bottle transported by an automated vehicle. ### Claim 16 (depends on 15) The method of claim 15, further comprising winding a hose, with an automatic winding device, wherein the hose is configured to deliver PR from the PR bottle to a chemical dispensing system. ### Claim 17 (depends on 15) The method of claim 15, wherein scanning and detecting the objects surrounding the door unit is performed prior to ejecting the holder. ### Claim 18 (depends on 15) The method of claim 15, wherein the automated vehicle comprises a robotic arm, and wherein replacing the PR bottle in the holder with the another PR bottle in the automated vehicle comprises: transferring, with the robotic arm, the PR bottle from the holder to the automated vehicle; and transferring, with the robotic arm, the another PR bottle from the automated vehicle to the holder. ### Claim 19 (depends on 15) The method of claim 15, further comprising confirming, with a placement sensor, a placement of the another PR bottle in the holder. ### Claim 20 (depends on 19) The method of claim 19, further comprising sending a notification to an electronic device to report a misplacement of the another PR bottle in the holder.