# US 11,029,578 B2 · Acousto-optic beam steering system

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- Number: US 11,029,578 B2
- Document ID: US11029578B2
- Status: Granted
- Kind: B2
- Application number: 16/621,977
- Filed: 2018-07-02
- Published: 2020-06-18
- Granted: 2021-06-08
- Earliest claimed: 2017-06-30
- Assignees: The Board of Trustees of the Leland Stanford Junior University
- Applicants: The Board of Trustees of the Leland Stanford Junior University
- Inventors: Amir-Hossein Safavi-Naeini; Christopher John Sarabalis; Jeremy David Witmer; Patricio Arrangoiz Arriola; Raphael Frank Van Laer
- Web page: https://patentgrep.com/patent/US11029578B2

## CPC

- G02F 1/0134: {in optical waveguides}
- G02F 1/335: having an optical waveguide structure
- G02F 1/125: in an optical waveguide structure
- G02F 1/2955: {by controlled diffraction or phased-array beam steering (controlled diffraction for optical waveguide switching G02F1/313)}
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS

## Abstract

Systems and methods for steering an optical beam in two dimensions are disclosed. The system includes a substrate comprising an acousto-optic antenna array and an acoustic transducer. Each antenna of the antenna array includes a high-confinement surface waveguide carrying a light signal. The acoustic transducer imparts acoustic energy into each surface waveguide as a mechanical wave. Interaction of the light signal and mechanical wave in each surface waveguide induces light to scatter into free space. The light scattered out of the plurality of waveguides collectively defines the output beam. The longitudinal angle of output beam, relative to the substrate, is determined by the relative frequencies of the mechanical waves and the light signals. The transverse angle of the output beam is controlled by controlling the relative phases of the mechanical waves and/or light signals across the surface-waveguide array.

## Claims

### Claim 1

An optical-beam steering system comprising:
a substrate;
a planar lightwave circuit (PLC) comprising at least one surface waveguide that is formed on the substrate such that the PLC and substrate are monolithically integrated, each of the at least one surface waveguide conveying at least a portion of a light signal, and the at least one surface waveguide defines a mechanically active region that is movable relative to the substrate;
an acoustic transducer that is configured to induce at least one mechanical wave in the at least one surface waveguide; and
a phase controller comprising a plurality of phase shifters that includes a first phase shifter configured to control at least one of (1) the phase of a first mechanical wave of the at least one mechanical wave and (2) the phase of a first light portion of the light signal in a first surface waveguide of the at least one surface waveguide.

### Claim 2 (depends on 1)

The optical-beam steering system of claim 1:
wherein the at least one surface waveguide includes a plurality of surface waveguides, each surface waveguide of the plurality thereof being movable relative to the substrate, and each surface waveguide of the plurality thereof conveying a different light portion of the light signal;
wherein the at least one mechanical wave includes a first plurality of mechanical waves, each of which is coupled into a different surface waveguide of the plurality thereof;
wherein each phase shifter of the plurality thereof is configured to control the relative phase of each mechanical wave of the first plurality thereof and the light portion conveyed by its respective surface waveguide.

### Claim 3 (depends on 2)

The optical-beam steering system of claim 2 wherein the first phase shifter is operative for controlling a physical property of a first material region located between the acoustic transducer and the first surface waveguide.

### Claim 4 (depends on 3)

The optical-beam steering system of claim 3 wherein the physical property is selected from the group consisting of elasticity and density.

### Claim 5 (depends on 2)

The optical-beam steering system of claim 2 wherein each of the plurality of phase shifters is a mechanical phase shifter that is operative for controlling a different material region of a plurality thereof, wherein each material region is located between the acoustic transducer and a different surface waveguide of the plurality thereof.

### Claim 6 (depends on 2)

The optical-beam steering system of claim 2 wherein each of the plurality of phase shifters is an optical phase shifter that is configured to impart a phase shift on a different portion of the light signal.

### Claim 7 (depends on 2)

The optical-beam steering system of claim 2 wherein the light signal is characterized by a wavelength, and wherein each of the plurality of surface waveguides includes a first portion, and wherein the plurality of first portions is arranged in a linear array having a uniform pitch that is within the range of approximately λ/3 to approximately 2λ.

### Claim 8 (depends on 1)

The optical-beam steering system of claim 1 wherein the PLC defines a first plane, and wherein the plurality of surface waveguides and the acoustic transducer are configured such that at least one light portion of the plurality thereof and at least one mechanical wave of the first plurality thereof interact to scatter optical energy of the at least one light portion out of the first plane as at least one output beam.

### Claim 9 (depends on 1)

The optical-beam steering system of claim 1 further comprising a plurality of supports that support the mechanically active region above the substrate, each support being located between a pair of adjacent surface waveguides of the plurality thereof, and each support being configured to mitigate mechanical coupling between its respective pair of adjacent surface waveguides.

### Claim 10 (depends on 1)

The optical-beam steering system of claim 1 wherein the at least one surface waveguide includes a slab waveguide, and wherein the at least one mechanical wave includes a first plurality of mechanical waves that propagate in the slab waveguide, and further wherein the phase controller is configured to control the relative phases of the first plurality of mechanical waves.

### Claim 11 (depends on 1)

The optical-beam steering system of claim 1 wherein the at least one surface waveguide includes a slab waveguide, and wherein the light signal includes a plurality of light portions, and further wherein the phase controller is configured to control the relative phases of the plurality of light portions.

### Claim 12

A method for steering an optical beam, the method comprising:
conveying a light signal having wavelength λ in at least one surface waveguide of a planar-lightwave circuit (PLC) that is formed on a substrate such that the at least one surface waveguide and the substrate are monolithically integrated, wherein the at least one surface waveguide defines a mechanically active region that is movable relative to the substrate;
coupling a plurality of mechanical waves into the at least one surface waveguide such that interaction between the plurality of mechanical waves and the at least one light signal gives rise to emission of an optical beam from the plurality of surface waveguides, wherein the mechanical waves are characterized by first frequency, ω; and
controlling the first frequency, ω.

### Claim 13 (depends on 12)

The method of claim 12 wherein the at least one surface waveguide includes a plurality of surface waveguides that are movable relative to the substrate, and wherein the light signal includes a plurality of light portions, each of which propagates in a different surface waveguide of the plurality thereof, and further wherein a different mechanical wave of the plurality thereof is coupled into each of the surface waveguides of the plurality thereof.

### Claim 14 (depends on 13)

The method of claim 13 further comprising controlling a first relative phase of a first light portion of the plurality thereof and a first mechanical wave of the plurality thereof in a first surface waveguide of the plurality thereof, wherein the first relative phase is at least partially controlled by controlling the phase of the first mechanical wave.

### Claim 15 (depends on 14)

The method of claim 14 wherein the phase of the first mechanical wave is controlled by controlling a physical property of a first material region located between an acoustic transducer and the first waveguide, the physical property being selected from the group consisting of elasticity and density.

### Claim 16 (depends on 13)

The method of claim 13 further comprising controlling a first relative phase of a first light portion of the plurality thereof and a first mechanical wave of the plurality thereof in a first surface waveguide of the plurality thereof, wherein the first relative phase is at least partially controlled by controlling the phase of the first light portion.

### Claim 17 (depends on 13)

The method of claim 13 further comprising controlling the relative phases of the plurality of mechanical waves.

### Claim 18 (depends on 13)

The method of claim 13 further comprising controlling the relative phases of the plurality of light portions.

### Claim 19 (depends on 13)

The method of claim 13 wherein each of the plurality of surface waveguides includes a first portion, and wherein the plurality of first portions is arranged in a linear array having a uniform pitch that is within the range of approximately λ/3 to approximately 2λ.

### Claim 20 (depends on 12)

The method of claim 12 wherein the PLC defines a first plane, and wherein the method further includes: interacting at least one light portion of the plurality thereof and at least one mechanical wave of the first plurality thereof to scatter optical energy of the at least one light portion out of the first plane to define the optical beam.

### Claim 21 (depends on 12)

The method of claim 12 wherein the at least one surface waveguide includes a slab waveguide, and wherein the plurality of mechanical waves is coupled into the slab waveguide.

### Claim 22 (depends on 21)

The method of claim 21 wherein the at least one surface waveguide includes a slab waveguide, and wherein the plurality of mechanical waves is coupled into the slab waveguide as a composite wave.

### Claim 23 (depends on 22)

The method of claim 22 further comprising controlling the phases of the plurality of mechanical waves, wherein the propagation direction of the composite wave in the slab waveguide is based on the phases of the plurality of mechanical waves.

### Claim 24 (depends on 22)

The method of claim 22 further comprising controlling the phases of a plurality of light portions included in the light signal, wherein the propagation direction of the light signal in the slab waveguide is based on the phases of the plurality of light portions.