# US 11,029,465 B1 · Micro-ring modulator > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,029,465 B1 - Document ID: US11029465B1 - Status: Granted - Kind: B1 - Application number: 16/832,023 - Filed: 2020-03-27 - Granted: 2021-06-08 - Earliest claimed: 2020-03-27 - Assignees: GlobalFoundries U.S. Inc. - Applicants: GLOBALFOUNDRIES U.S. Inc. - Inventors: Michal Rakowski; Yusheng Bian; Ajey Poovannummoottil Jacob; Steven M. Shank - Web page: https://patentgrep.com/patent/US11029465B1 ## CPC - G02B 6/02361: {Longitudinal structures forming multiple layers around the core, e.g. arranged in multiple rings with each ring having longitudinal elements at substantially the same radial distance from the core, having rotational symmetry about the fibre axis} - G02B 6/125: Bends, branchings or intersections - G02B 6/28: having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals - G02B 6/29338: {Loop resonators} - G02F 1/0147: {based on thermo-optic effects (G02F1/132 takes precedence)} - G02F 1/025: in an optical waveguide structure (G02F1/017, {G02F1/2257} take precedence) - G02B 6/12002: {Three-dimensional structures} - G02B 6/1228: {Tapered waveguides, e.g. integrated spot-size transformers (for coupling with fibres G02B6/305)} - G02B 6/134: by substitution by dopant atoms - G02B 6/136: by etching - G02B 2006/12142: {Modulator} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS ## Abstract One illustrative device disclosed herein includes a micro-ring modulator that comprises an inner ring, an outer ring and a doped waveguide ring positioned between the inner ring and the outer ring. The device also includes an upper bus waveguide that is positioned vertically above at least a portion of the doped waveguide ring and at least a portion of the outer ring. ## Claims ### Claim 1 A device, comprising: a micro-ring modulator that comprises an inner ring, an outer ring and a doped waveguide ring positioned between the inner ring and the outer ring; and an upper bus waveguide that is positioned vertically above at least a portion of the doped waveguide ring and at least a portion of the outer ring, a lower waveguide, said lower waveguide comprising a first segment and a second segment that are spaced apart from one another, wherein the upper bus waveguide is also positioned vertically above at least a portion of the first segment and above at least a portion of the second segment, wherein the device further comprises a first heater structure positioned within the inner ring and a second heater structure positioned around an entire outer circumference of the outer ring. ### Claim 2 (depends on 1) The device of claim 1, wherein the upper bus waveguide comprises: a first portion that is positioned vertically above a space between the first segment of the lower waveguide and the outer ring; and a second portion that is positioned vertically above a space between the second segment of the lower waveguide and the outer ring. ### Claim 3 (depends on 1) The device of claim 1, wherein, when viewed from above, the upper bus waveguide is a substantially linear line-type structure. ### Claim 4 (depends on 1) The device of claim 1, wherein, when viewed from above, the upper bus waveguide comprises a non-linear section. ### Claim 5 (depends on 4) The device of claim 4, wherein the non-linear section is an arcuate section. ### Claim 6 (depends on 4) The device of claim 4, wherein at least a portion of the non-linear section is positioned vertically above a portion of the doped waveguide ring. ### Claim 7 (depends on 1) The device of claim 1, wherein the first segment of the lower waveguide comprises a first end, the second segment of the lower waveguide comprises a second end, the upper bus waveguide comprises a third end and a fourth end, wherein at least a portion of the third end is positioned vertically above at least a portion of the first end and at least a portion of the fourth end is positioned vertically above at least a portion of the second end. ### Claim 8 (depends on 7) The device of claim 7, wherein the first end, the second end, the third end and the fourth end are tapered. ### Claim 9 (depends on 1) The device of claim 1, wherein the upper bus waveguide is vertically spaced apart from a portion of at least one of the inner ring, the doped waveguide ring and the outer ring of the micro-ring modulator. ### Claim 10 A device, comprising: a micro-ring modulator comprising an inner ring, an outer ring and a doped waveguide ring positioned between the inner ring and the outer ring; a lower waveguide, the lower waveguide comprising a first segment and a second segment that are spaced apart from one another; and an upper bus waveguide comprising a first portion, a second portion, and a third portion located between the first portion and the second portion, wherein the first portion is positioned vertically above at least a portion of the first segment, the second portion is positioned vertically above at least a portion of the second segment and the third portion is positioned vertically above and vertically spaced apart from a portion of at least one of the inner ring, the doped waveguide ring and the outer ring of the micro-ring modulator, wherein the device further comprises a first heater structure positioned within the inner ring and a second heater structure positioned around an entire outer circumference of the outer ring. ### Claim 11 (depends on 10) The device of claim 10, wherein the lower waveguide, the inner ring, the outer ring and the doped waveguide ring comprise silicon and the upper bus waveguide comprises silicon nitride. ### Claim 12 (depends on 10) The device of claim 10, wherein the upper bus waveguide comprises: a fourth portion positioned between the first portion and the third portion, wherein the fourth portion is positioned vertically above a space between the first segment of the lower waveguide and the outer ring; and a fifth portion positioned between the second portion and the third portion, wherein the fifth portion is positioned vertically above a space between the second segment of the lower waveguide and the outer ring. ### Claim 13 (depends on 10) The device of claim 10, wherein, when viewed from above, the upper bus waveguide comprises a non-linear section. ### Claim 14 (depends on 13) The device of claim 13, wherein the non-linear section is an arcuate section. ### Claim 15 (depends on 13) The device of claim 13, wherein at least a portion of the non-linear section is positioned vertically above a portion of at least one of the inner ring, the doped waveguide ring and the outer ring of the micro-ring modulator.