# US 11,029,449 B2 · Antireflection film, optical element, optical system, method of producing antireflection film

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- Number: US 11,029,449 B2
- Document ID: US11029449B2
- Status: Granted
- Kind: B2
- Application number: 16/269,271
- Filed: 2019-02-06
- Published: 2019-06-06
- Granted: 2021-06-08
- Earliest claimed: 2016-08-31
- Assignees: FUJIFILM Corporation
- Applicants: FUJIFILM Corporation
- Inventors: Kenichi Umeda; Seigo Nakamura; Yuichiro Itai; Hideki Yasuda
- Web page: https://patentgrep.com/patent/US11029449B2

## CPC

- C23C 14/024: {Deposition of sublayers, e.g. to promote adhesion of the coating (C23C14/027 takes precedence)}
- G02B 1/115: Multilayers
- B32B 9/00: Layered products comprising a {layer of a} particular substance not covered by groups B32B11/00 - B32B29/00
- B32B 15/04: comprising metal as the main or only constituent of a layer, {which is} next to another layer of {the same or of} a {different material (next to a bituminous or tarry layer B32B11/08; next to a water-setting substance layer B32B13/06; next to a glass layer B32B17/061; next to a cellulosic plastic layer B32B23/042)}
- C23C 14/06: characterised by the coating material ({C23C14/0021} , C23C14/04 take precedence)
- C23C 14/14: Metallic material, boron or silicon
- C23C 14/5893: {Mixing of deposited material}
- G02B 1/111: using layers comprising organic materials
- G02B 1/116: including electrically conducting layers
- G02B 15/145: {having five groups only}
- G02B 15/20: having an additional movable lens or lens group for varying the objective focal length
- G02B 15/167: having an additional fixed front lens or group of lenses
- G02B 15/173: arranged +-+
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- B32B: LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM

## Abstract

An antireflection film is formed by laminating an interlayer, a silver-containing metal layer containing silver, and a dielectric layer in this order from the substrate, an anchor region including an oxide of an anchor metal is provided between the silver-containing metal layer and the interlayer, a cap region including an oxide of the anchor metal included in the anchor region is provided between the silver-containing metal layer and the dielectric layer, a crystal grain size obtained by X-ray diffraction measurement in the silver-containing metal layer is less than 6.8 nm, and the anchor metal has a surface energy less than a surface energy of silver and greater than a surface energy of a layer of the interlayer closest to the silver-containing metal layer.

## Claims

### Claim 1

An antireflection film that is provided on a substrate and is formed by laminating an interlayer, a silver-containing metal layer containing silver, and a dielectric layer in this order from the substrate, comprising:
an anchor region including an oxide of an anchor metal provided between the silver-containing metal layer and the interlayer; and
a cap region including an oxide of the anchor metal provided between the silver-containing metal layer and the dielectric layer,
wherein a crystal grain size obtained by X-ray diffraction measurement in the silver-containing metal layer is less than 6.8 nm, and
the anchor metal is Ge.

### Claim 2 (depends on 1)

The antireflection film according to claim 1,
wherein a total film thickness including the anchor region, the silver-containing metal layer, and the cap region is 10 nm or less.

### Claim 3 (depends on 1)

The antireflection film according to claim 1,
wherein the anchor region includes the anchor metal which is not oxidized, and a content ratio of the oxide of the anchor metal is larger than a content ratio of the anchor metal which is not oxidized.

### Claim 4 (depends on 1)

The antireflection film according to claim 1,
wherein the surface energy of the anchor metal is 500 mN/m or more and 900 mN/m or less.

### Claim 5 (depends on 1)

An optical element comprising:
the antireflection film according to claim 1.