# US 11,029,424 B2 · X-ray detectors of high spatial resolution > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,029,424 B2 - Document ID: US11029424B2 - Status: Granted - Kind: B2 - Application number: 15/737,797 - Filed: 2015-10-14 - Published: 2019-01-03 - Granted: 2021-06-08 - Earliest claimed: 2015-10-14 - Assignees: Shenzhen Xpectvision Technology Co., Ltd. - Applicants: Shenzhen Xpectvision Technology Co., Ltd. - Inventors: Peiyan Cao; Yurun Liu - Web page: https://patentgrep.com/patent/US11029424B2 ## CPC - G01T 1/247: {Detector read-out circuitry (for processing gain or off-set correction H04N)} - H10F 39/1892: {Direct radiation image sensors} - H10F 39/195: {X-ray, gamma-ray or corpuscular radiation imagers} - H10F 39/8057: {Optical shielding} - A61B 6/4208: {characterised by using a particular type of detector} - G01N 23/046: using tomography, e.g. computed tomography [CT] - G01V 5/226: using tomography - H01J 37/244: Detectors; Associated components or circuits therefor - G01T: MEASUREMENT OF NUCLEAR OR X-RADIATION (radiation analysis of materials, mass spectrometry G01N23/00; tubes for determining the presence, intensity, density or energy of radiation or particles H01J47/00) - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION - A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D) - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - G01V: GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS (means for indicating the location of accidentally buried, e.g. snow-buried, persons A63B29/02) - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract An apparatus, system and method suitable for detecting X-ray are disclosed. In one example, the apparatus comprises: an X-ray absorption layer and a mask; wherein the mask comprises a first window and a second window, and a portion between the first window and the second window; wherein the first and second windows are not opaque to an incident X-ray; wherein the portion is opaque to the incident X-ray; and wherein the first and second windows are arranged such that charge carriers generated in the X-ray absorption layer by an X-ray photon propagating through the first window and charge carriers generated in the X-ray absorption layer by an X-ray photon propagating through the second window do not spatially overlap. ## Claims ### Claim 1 An apparatus suitable for detecting X-ray, comprising: an X-ray absorption layer and a mask; wherein the mask comprises a first window and a second window, and a portion between the first window and the second window; wherein the first and second windows are not opaque to an incident X-ray; wherein the portion is opaque to the incident X-ray; and wherein the first and second windows are arranged such that charge carriers generated in the X-ray absorption layer by an X-ray photon propagating through the first window and charge carriers generated in the X-ray absorption layer by an X-ray photon propagating through the second window do not spatially overlap; wherein the first window and the second window are nearest neighbors. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the apparatus further comprises a first set of electrodes configured to receive a signal from the incident X-ray propagating through the first window, and a second set of electrodes configured to receive a signal from the incident X-ray propagating through the second window. ### Claim 3 (depends on 2) The apparatus of claim 2, wherein receiving the signal comprises collecting charge carriers generated by the incident X-ray. ### Claim 4 (depends on 1) The apparatus of claim 1, wherein the first window or the second window or both comprises a blind hole. ### Claim 5 (depends on 1) The apparatus of claim 1, wherein the first window or the second window or both comprises a blind slot. ### Claim 6 (depends on 1) The apparatus of claim 1, wherein the first window or the second window or both comprises a material different from a material of the portion. ### Claim 7 (depends on 1) The apparatus of claim 1, wherein the mask comprises a metal. ### Claim 8 (depends on 1) A system comprising the apparatus of claim 1 and an X-ray source, wherein the system is configured for performing X-ray radiography on human chest or abdomen. ### Claim 9 (depends on 1) A system comprising the apparatus of claim 1 and an X-ray source, wherein the system is configured for performing X-ray radiography on human mouth. ### Claim 10 (depends on 1) A cargo scanning or non-intrusive inspection (NII) system, comprising the apparatus of claim 1 and an X-ray source, wherein the cargo scanning or non-intrusive inspection (NII) system is configured for forming an image based on backscattered X-ray. ### Claim 11 (depends on 1) A cargo scanning or non-intrusive inspection (NII) system, comprising the apparatus of claim 1 and an X-ray source, wherein the cargo scanning or non-intrusive inspection (NII) system is configured for forming an image based on X-ray transmitted through an object inspected. ### Claim 12 (depends on 1) A full-body scanner system comprising the apparatus of claim 1 and an X-ray source. ### Claim 13 (depends on 1) An X-ray computed tomography (X-ray CT) system comprising the apparatus of claim 1 and an X-ray source. ### Claim 14 (depends on 1) An electron microscope comprising the apparatus of claim 1, an electron source and an electronic optical system. ### Claim 15 (depends on 1) A system comprising the apparatus of claim 1, wherein the system is configured for measuring dose of an X-ray source. ### Claim 16 (depends on 1) A system comprising the apparatus of claim 1, wherein the system is an X-ray telescope, an X-ray microscopy or an X-ray micro-CT system, or wherein the system is configured for performing mammography, industrial defect detection, microradiography, casting inspection, weld inspection, or digital subtraction angiography. ### Claim 17 (depends on 1) A system suitable for phase-contrast X-ray imaging (PCI), the system comprising: the apparatus of claim 1; a second X-ray detector; and a spacer, wherein the apparatus and the second X-ray detector are spaced apart by the spacer. ### Claim 18 (depends on 17) The system of claim 17, wherein the apparatus and the second X-ray detector are configured for respectively capturing an image of an object simultaneously. ### Claim 19 (depends on 17) The system of claim 17, wherein the second X-ray detector is identical to the apparatus. ### Claim 20 (depends on 1) A system suitable for phase-contrast X-ray imaging (PCI), the system comprising the apparatus of claim 1, wherein the apparatus is configured for moving to and capturing images of an object exposed to incident X-ray at different distances from the object. ### Claim 21 (depends on 1) A method of using an apparatus of claim 1, the method comprising: placing the apparatus at a plurality of positions relative to a scene; obtaining data with the apparatus at the plurality of positions; compiling an image of the scene from the data. ### Claim 22 (depends on 21) The method of claim 21, wherein obtaining data comprises moving the apparatus relative to the scene. ### Claim 23 (depends on 21) The method of claim 21, wherein obtaining data comprises moving the scene relative to the apparatus. ### Claim 24 (depends on 21) The method of claim 21, wherein obtaining data comprises moving a lens relative to the scene and the apparatus. ### Claim 25 (depends on 21) The method of claim 21, wherein obtaining data comprises measuring intensity of incident X-ray propagating through each of the windows.