# US 11,029,253 B2 · Computerized method for configuring an inspection system, computer program product and an inspection system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,029,253 B2 - Document ID: US11029253B2 - Status: Granted - Kind: B2 - Application number: 15/474,210 - Filed: 2017-03-30 - Published: 2018-10-04 - Granted: 2021-06-08 - Earliest claimed: 2017-03-30 - Assignees: Applied Materials Israel Ltd. - Applicants: Applied Materials Israel Ltd. - Inventors: Amir Shoham; Ido Dolev; Yariv Simovitch - Web page: https://patentgrep.com/patent/US11029253B2 ## CPC - G01N 21/8806: {Specially adapted optical and illumination features} - G01N 21/8851: {Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges (G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002)} - G01N 21/956: Inspecting patterns on the surface of objects {(contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20)} - G06T 7/0004: {Industrial image inspection} - G01N 2021/8848: {Polarisation of light} - G01N 2021/8887: {based on image processing techniques} - G01N 2021/95676: {Masks, reticles, shadow masks} - G06T 2207/10152: Varying illumination - G06T 2207/30148: Semiconductor; IC; Wafer - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL ## Abstract A computer program product, a computerized method for configuring an inspection system and an inspection system. The inspection system may include an image acquisition module that comprises illumination optics and collection optics, a controller; and a processor. The image acquisition module may be arranged to acquire a group of first images of an object segment. Different first images of the group of first images are acquired while the inspection system is configured with different polarization configurations that belong to a first group of polarization configurations. The processor may be arranged to determine polarization parameters of different points within the object segment; wherein the determining is based on the group of first images and the different polarization configurations and calculate, based on the polarization parameters of the different points, a group of second images of the object segment that would be acquired when the inspection system is configured according to different polarization configurations that belong to a second group of polarization configurations. ## Claims ### Claim 1 An inspection system that comprises: an image acquisition module that comprises illumination optics and collection optics; a polarization controller; and a processor; wherein the image acquisition module is arranged to acquire a group of first images, each image of the group of first images capturing a same portion of an object segment; wherein different first images of the group of first images are acquired while the illumination optics and the collection optics are configured with different combinations of first illumination polarization states and first collection polarization states that belong to a first group of polarization configurations; wherein the processor is arranged to: determine a plurality of polarization parameters of each pixel in each image of the group of first images; calculate, based on the plurality of polarization parameters, a group of second images of the object segment, wherein the group of second images represent a second group of polarization configurations comprising combinations of second illumination polarization states and second collection polarization states, wherein at least some of the second illumination polarization states are different from the first illumination polarization states, and wherein a number of different polarization configurations of the second group of polarization configurations is bigger than a number of different polarization configurations included in the first group of polarization configurations; compute a second image attribute for each second image of the group of second images thereby providing multiple second image attributes; and select, out of the group of second images, a selected second image based on at least some of the multiple second image attributes; wherein the polarization controller is arranged to configure the inspection system according to a polarization configuration that is associated with the selected second image. ### Claim 2 (depends on 1) The inspection system according to claim 1 wherein the plurality of polarization parameters of each pixel in each image of the group of first images comprise a Muller matrix. ### Claim 3 A computerized method for configuring an inspection system, the method comprises: acquiring, by the inspection system, a group of first images, each image of the group of first images capturing a same portion of an object segment; wherein different first images of the group of first images are acquired while the inspection system is configured with different polarization configurations that belong to a first group of polarization configurations, the first group of polarization configurations including combinations of first illumination polarization states and first collection polarization states; determining a plurality of polarization parameters of each pixel in each image of the group of first images; calculating, based on the plurality of polarization parameters, a group of second images of the object segment, wherein the group of second images represent different polarization configurations that belong to a second group of polarization configurations, the second group of polarization configurations including combinations of second illumination polarization states and second collection polarization states, wherein at least some of the second group of polarization configurations are different from the first group of polarizations configurations, and at least some of the second illumination polarization states are different from the first illumination polarization states; wherein a number of different polarization configurations of the second group of polarization configurations is bigger than a number of different polarization configurations included in the first group of polarization configurations; computing a second image attribute for each second image of the group of second images thereby providing multiple second image attributes; selecting, out of the group of second images, a selected second image based on at least some of the multiple second image attributes; and configuring the inspection system according to a polarization configuration that is associated with the selected second image. ### Claim 4 (depends on 3) The computerized method according to claim 3 wherein the plurality of polarization parameters of each pixel in each image of the group of first images comprise a Muller matrix. ### Claim 5 (depends on 3) The computerized method according to claim 3 wherein the second image attribute is a signal to noise ratio of the second image. ### Claim 6 (depends on 3) The computerized method according to claim 3 wherein the different polarization configurations that belong to the first group of polarization configurations comprise different combinations of first illumination polarization states and of first collection polarization states. ### Claim 7 (depends on 6) The computerized method according to claim 6 wherein determining the plurality of polarization parameters of a given pixel comprises comparing between (a) a matrix of givens pixels from the group of first images, (b) a product of multiplication between (i) a vector that represents the first collection polarization states, (ii) a Muller matrix of the given pixel, and (ii) a vector that represents the first illumination polarization states. ### Claim 8 (depends on 6) The computerized method according to claim 6 wherein determining the plurality of polarization parameters of a given pixel is based on (a) information about givens pixels from the group of first images, (b) information about the first collection polarization states, and (c) information about the first illumination polarization states. ### Claim 9 (depends on 3) The computerized method according to claim 3 wherein the different polarization configurations that belong to the second group of polarization configurations comprise different combinations of second illumination polarization states and of second collection polarization states. ### Claim 10 (depends on 9) The computerized method according to claim 9 wherein calculating, based on the plurality of polarization parameters of different pixels of a given second image, comprises multiplying (i) a vector that represents the second collection polarization states, by (ii) Muller matrixes of the different pixels, and by (iii) a vector that represents the second illumination polarization states. ### Claim 11 (depends on 3) The computerized method according to claim 3 wherein the number of different polarization configurations of the second group of polarization configurations is at least one thousand times bigger than the number of different polarization configurations included in the first group of polarization configurations. ### Claim 12 A non-transitory computer readable medium that stores instructions for: acquiring, by an inspection system, a group of first pupil images; wherein different first pupil images of the group of first pupil images are acquired while the inspection system is configured with different combinations of first illumination polarization states and first collection polarization states that belong to a first group of polarization configurations; determining a plurality of polarization parameters of each pixel in each image of the group of first pupil images; calculating, based on the plurality of polarization parameters, a group of second pupil images, wherein the group of second pupil images represent a second group of polarization configurations comprising combinations of second illumination polarization states and second collection polarization states, wherein at least some of the second illumination polarization states are different from the first illumination polarization states; wherein a number of different polarization configurations of the second group of polarization configurations is bigger than a number of different polarization configurations included in the first group of polarization configurations; computing a second pupil image attribute for each second pupil image of the group of second pupil images thereby providing multiple second pupil image attributes; selecting, out of the group of second pupil images, a selected second pupil image based on at least some of the multiple second pupil image attributes; and configuring the inspection system according to a polarization configuration that is associated with the selected second pupil image. ### Claim 13 (depends on 12) The non-transitory computer readable medium according to claim 12 that stores instructions for acquiring, by the inspection system, the group of first pupil images by irradiating a mirror. ### Claim 14 (depends on 12) The non-transitory computer readable medium according to claim 12 wherein the plurality of polarization parameters of each pixel in each image of the group of first pupil images comprise a Muller matrix.