# US 11,029,143 B2 · Method and device for optical surface measurement by means of a chromatic confocal sensor > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,029,143 B2 - Document ID: US11029143B2 - Status: Granted - Kind: B2 - Application number: 16/327,158 - Filed: 2017-07-12 - Published: 2019-06-20 - Granted: 2021-06-08 - Earliest claimed: 2016-08-25 - Assignees: NanoFocus AG - Applicants: NanoFocus AG - Inventors: Johannes Frank - Web page: https://patentgrep.com/patent/US11029143B2 ## CPC - G01B 11/24: for measuring contours or curvatures - G01B 11/026: {by measuring distance between sensor and object (G01B11/0608 takes precedence)} - G01B 11/0608: {Height gauges} - G01B 2210/50: Using chromatic effects to achieve wavelength-dependent depth resolution - G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS ## Abstract The invention relates to a method and a device for the optical measurement of technical surfaces by means of a chromatic confocal sensor, wherein light from a light source (2) is directed to the surface (5) of a sample to be measured via an optical system (4, 14) with defined chromatic aberration. According to the invention, the light source (2) can be tuned in relation to the wavelength to be emitted. The light reflected back from the sample surface (5) is directed to at least one photosensor (7), wherein the sensor signal is measured over time by means of a detection system (8) and the time of a signal maximum is determined. The detection system (8) derives the height Z of the surface (5) from the wavelength of the light source (2) at the time of the signal maximum. ## Claims ### Claim 1 A method for the optical measurement of technical surfaces by means of a chromatic confocal sensor, wherein light from at least one light source is directed to the surface of a sample to be measured via an optical system with defined chromatic aberration, wherein the light source is tuned in relation to the wavelength to be emitted and the light reflected back from the sample surface is directed to at least one photosensor, wherein the sensor signal is measured over time and, the time and intensity of a signal maximum are determined and evaluated, wherein the height Z of the surface is derived from the wavelength of the light source at the time of the signal maximum, whereby the time-varying signal of the photosensor is analyzed electronically by means of a detection system to determine the signal maximum, wherein the detection system has an extreme value memory which monitors the time-varying signal until an extreme of the signal has been reached in each case, a peak indicator signal being generated in each case when the extreme is reached, with the aid of which the time of the extreme is established and with the aid of which in turn the wavelength of the light source associated with the signal maximum is established. ### Claim 2 (depends on 1) The method according to claim 1, wherein the light from the light source is split into a plurality of beamlets, wherein the beamlets that are reflected back are detected in parallel by means of a multi-channel photosensor. ### Claim 3 (depends on 1) The method according to claim 1, wherein a plurality of light sources are used, wherein the individual beams of the light sources that are reflected back are detected in parallel by means of a multi-channel photosensor. ### Claim 4 (depends on 1) A chromatic confocal sensor for carrying out the method according to claim 1, having at least one light source, the light from which is directed via an optical system with defined chromatic aberration to the surface of a sample to be measured, wherein the light source can be tuned in relation to the wavelength to be emitted and the light reflected bark from the sample surface is directed to at least one photosensor, wherein the sensor signal is measured over time by means of a detection system and the time of a signal maximum is determined, wherein the detection system is configured to derive the height Z of the surface front the wavelength of the light source at the time of the signal maximum. ### Claim 5 (depends on 4) The chromatic confocal sensor according to claim 4, wherein the photosensor is a photodiode. ### Claim 6 (depends on 4) The chromatic confocal sensor according to claim 4, wherein the light from the light source is split by means of a beam splitter into a plurality of beamlets, wherein the beamlets that are reflected back are detected in parallel by means of a multi-channel photosensor. ### Claim 7 (depends on 4) The chromatic confocal sensor according to claim 4, wherein, a plurality of light sources are provided, wherein the individual beams from the light sources that are reflected back are detected in parallel by means of a multi-channel photosensor. ### Claim 8 (depends on 4) The chromatic confocal sensor according to claim 4, wherein the light from the light source is directed via a beam splitter to the optical system with defined chromatic aberration. ### Claim 9 (depends on 8) The chromatic confocal sensor according to claim 8, wherein the beam splitter is a semi-transparent mirror. ### Claim 10 (depends on 8) The chromatic confocal sensor according to claim 8, wherein the beam splitter is a beam splitter cube. ### Claim 11 (depends on 4) The chromatic confocal sensor according to claim 4, wherein a confocal filter is located upstream of the photosensor and/or a confocal filter is located downstream of the light source. ### Claim 12 (depends on 4) The chromatic confocal sensor according to claim 4, wherein the light source, the photosensor and the optical system are connected to each other by fiber coupler via optical fibers. ### Claim 13 (depends on 4) The chromatic confocal sensor according to claim 4, wherein the light source is a laser.