# US 11,028,500 B2 · Ingot puller apparatus that include a doping conduit with a porous partition member for subliming solid dopant > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,028,500 B2 - Document ID: US11028500B2 - Status: Granted - Kind: B2 - Application number: 16/220,060 - Filed: 2018-12-14 - Published: 2020-06-18 - Granted: 2021-06-08 - Earliest claimed: 2018-12-14 - Assignees: GlobalWafers Co., Ltd. - Applicants: Globalwafers Co., Ltd. - Inventors: Roberto Scala; Stephan Haringer; Franco Battan - Web page: https://patentgrep.com/patent/US11028500B2 ## CPC - C30B 15/20: Controlling or regulating (controlling or regulating in general G05) - C30B 15/04: adding doping materials, e.g. for n-p-junction - C30B 15/14: Heating of the melt or the crystallised materials - C30B 29/06: Silicon - C30B: SINGLE-CRYSTAL GROWTH (by using ultra-high pressure, e.g. for the formation of diamonds, B01J3/06); UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL (zone-refining of metals or alloys C22B); PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (casting of metals, casting of other substances by the same processes or devices B22D; working of plastics B29; modifying the physical structure of metals or alloys C21D, C22F); SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (for producing semiconductor devices or parts thereof H10); APPARATUS THEREFOR ## Abstract Ingot puller apparatus for preparing silicon ingots that include a dopant feed system are disclosed. The dopant feed system include a dopant conduit having a porous partition member disposed across the dopant conduit. Solid dopant falls onto the partition member where it sublimes. The sublimed dopant is carried by inert gas through the partition member to contact and dope the silicon melt. ## Claims ### Claim 1 An ingot puller apparatus for producing a silicon ingot comprising: a crucible for holding a melt of silicon; a growth chamber for pulling a silicon ingot from the melt; and a dopant conduit for introducing dopant into the melt, the dopant conduit having a length and comprising: one or more sidewalls, the one or more sidewalls forming a conduit chamber through which dopant passes, the conduit chamber having a width; an inlet through which solid dopant is introduced into the dopant conduit; an outlet through which a gaseous dopant is discharged through the dopant conduit; and a partition member disposed between the inlet and the outlet and supporting solid dopant introduced through the inlet, the partition member extending across the width of the conduit chamber, the partition member being within the last 25% of the length of the dopant conduit. ### Claim 2 (depends on 1) The ingot puller apparatus as set forth in claim 1 wherein the partition member is porous to allow sublimed dopant to pass through the partition member and toward the melt. ### Claim 3 (depends on 2) The ingot puller apparatus as set forth in claim 2 wherein the partition member has a nominal maximum pore size of less than about 1 mm. ### Claim 4 (depends on 2) The ingot puller apparatus as set forth in claim 2 wherein the partition member has a nominal maximum pore size of less than about 500 μm. ### Claim 5 (depends on 2) The ingot puller apparatus as set forth in claim 2 wherein the partition member has a nominal maximum pore size from about 1 μm to about 1 mm. ### Claim 6 (depends on 2) The ingot puller apparatus as set forth in claim 2 wherein the partition member has a nominal maximum pore size from about 10 μm to about 750 μm. ### Claim 7 (depends on 1) The ingot puller apparatus as set forth in claim 1 wherein the dopant conduit is cylindrical and the partition member is a disk. ### Claim 8 (depends on 1) The ingot puller apparatus as set forth in claim 1 wherein the dopant conduit is oval, triangular, square, or rectangle in cross-section. ### Claim 9 (depends on 1) The ingot puller apparatus as set forth in claim 1 wherein the dopant conduit has a longitudinal axis, the crucible having a horizontal plane that extends across a top of the crucible, the longitudinal axis of the dopant conduit and the horizontal plane forming an angle of between about 45 degrees and about 90 degrees. ### Claim 10 (depends on 1) The ingot puller apparatus as set forth in claim 1 wherein the dopant conduit has a longitudinal axis, the crucible having a horizontal plane that extends across a top of the crucible, the longitudinal axis of the dopant conduit and the horizontal plane forming an angle of between about 45 degrees and about 75 degrees. ### Claim 11 (depends on 9) The ingot puller apparatus as set forth in claim 9 wherein the partition member has a supporting surface having an uppermost point and a lowermost point relative to the longitudinal axis that define a supporting surface plane that extends through the uppermost and lowermost points, the longitudinal axis of the dopant conduit and the supporting surface plane forming an acute angle between about 45 degrees to about 90 degrees. ### Claim 12 (depends on 9) The ingot puller apparatus as set forth in claim 9 wherein the partition member has a supporting surface having an uppermost point and a lowermost point relative to the longitudinal axis that define a supporting surface plane that extends through the uppermost and lowermost points, the longitudinal axis of the dopant conduit and the supporting surface plane forming an acute angle between about 45 degrees to about 75 degrees. ### Claim 13 (depends on 11) The ingot puller apparatus as set forth in claim 11 wherein the supporting surface is parallel to the horizontal plane that extends across the top of the crucible. ### Claim 14 (depends on 11) The ingot puller apparatus as set forth in claim 11 wherein the supporting surface is parallel to the outlet of the dopant conduit. ### Claim 15 (depends on 1) The ingot puller apparatus as set forth in claim 1 wherein the dopant conduit is in fluid communication with an inert gas source to introduce inert gas into the dopant conduit to mix with sublimed dopant to form a doped inert gas, the doped inert gas being discharged through the outlet of the dopant conduit. ### Claim 16 (depends on 1) The ingot puller apparatus as set forth in claim 1 in combination with solid dopant supported by the partition member, the solid dopant being arsenic. ### Claim 17 (depends on 1) The ingot puller apparatus as set forth in claim 1 in combination with solid dopant supported by the partition member, the solid dopant being phosphorous. ### Claim 18 (depends on 1) The ingot puller apparatus as set forth in claim 1 wherein ingot puller apparatus comprises a heating element for heating the crucible, the ingot puller apparatus being free of a separate heating element for heating the solid dopant. ### Claim 19 (depends on 1) The ingot puller apparatus as set forth in claim 1 wherein the partition member is within the last 10% of the length of the dopant conduit. ### Claim 20 (depends on 1) The ingot puller apparatus as set forth in claim 1 wherein the partition member is within the last 5% of the length of the dopant conduit.