# US 11,028,497 B2 · Single crystal production apparatus and single crystal production method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,028,497 B2 - Document ID: US11028497B2 - Status: Granted - Kind: B2 - Application number: 16/323,759 - Filed: 2017-08-08 - Published: 2019-06-13 - Granted: 2021-06-08 - Earliest claimed: 2016-08-08 - Applicants: Shin Akutsu - Inventors: Shin Akutsu - Web page: https://patentgrep.com/patent/US11028497B2 ## CPC - C30B 13/24: using electromagnetic waves - C30B 13/30: Stabilisation or shape controlling of the molten zone, e.g. by concentrators, by electromagnetic fields; Controlling the section of the crystal - C30B: SINGLE-CRYSTAL GROWTH (by using ultra-high pressure, e.g. for the formation of diamonds, B01J3/06); UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL (zone-refining of metals or alloys C22B); PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (casting of metals, casting of other substances by the same processes or devices B22D; working of plastics B29; modifying the physical structure of metals or alloys C21D, C22F); SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (for producing semiconductor devices or parts thereof H10); APPARATUS THEREFOR ## Abstract A single crystal production apparatus that is designed to produce a single crystal by cooling a melting zone formed by a heating part including an infrared generation part and a reflection part, wherein: the reflection part includes a spheroidal mirror and a concave spherical mirror; the infrared generation part is disposed at one focal point of the spheroidal mirror; an opening is formed in the spheroidal mirror on the side of the other focal point of the spheroidal mirror; and the one focal point and the spherical center of the concave spherical mirror fall on the same location. ## Claims ### Claim 1 A single crystal production apparatus that produces a single crystal by cooling a melting zone formed by heating a raw material through reflection of an infrared ray, the single crystal production apparatus comprising: a reflection part reflecting the infrared ray toward the raw material; and an infrared generation part generating the infrared ray, wherein the reflection part comprises a spheroidal mirror and a concave spherical mirror, wherein the infrared generation part is disposed at one focal point F1 of the spheroidal mirror, wherein an opening is formed in the spheroidal mirror on a side of an other focal point F0 of the spheroidal mirror, the other focal point F0 coinciding with a site where the melting zone is formed, wherein the concave spherical mirror is provided at a location at which the concave spherical mirror opposes the opening of the spheroidal mirror, wherein the one focal point F1 and a spherical center of the concave spherical mirror fall on a same location, wherein at least one from among a location of the concave spherical mirror relative to the opening of the spheroidal mirror and a range through which the concave spherical mirror covers die opening is variable, and wherein the concave spherical mirror is movable, such that the concave spherical mirror is accommodated in a location where the concave spherical mirror does not oppose the opening prior to in a case that the single crystal production apparatus is in use, and in the case that the single crystal production apparatus is in use, the concave spherical mirror is moved in a sliding, manner to a location where the concave spherical mirror opposes the opening. ### Claim 2 (depends on 1) The single crystal production apparatus according to claim 1, wherein the other focal point F0 of the spheroidal mirror is located further on a lower side in a vertical direction as viewed from the focal point F1 at which the infrared generation part is disposed. ### Claim 3 (depends on 1) The single crystal production apparatus according to claim 1, wherein the apparatus comprises a plurality of sets each constituted by the infrared generation part and the reflection part, and wherein the other focal point F0 serves as a common focal point coinciding with the other focal point of the spheroidal mirror in each reflection part. ### Claim 4 (depends on 1) The single crystal production apparatus according to claim 1, further comprising a raw material grip portion and a seed crystal grip portion disposed on an upper side and a lower side, respectively, in a vertical direction. ### Claim 5 (depends on 4) The single crystal production apparatus according to claim 4, wherein the concave spherical mirror is disposed so as to oppose a lower side of the opening of the spheroidal mirror in the vertical direction. ### Claim 6 (depends on 1) The single crystal production apparatus according to claim 1, comprising a raw material grip portion and a seed crystal grip portion disposed on a lower side and an upper side, respectively, in a vertical direction. ### Claim 7 (depends on 1) The single crystal production apparatus according to claim 1, wherein the concave spherical mirror includes a constitution enabling displacement of the spherical center of the concave spherical mirror from a location at which the spherical center coincides with the one focal point F1 when reflecting an infrared ray to an inside of the spheroidal mirror. ### Claim 8 (depends on 1) The single crystal production apparatus according to claim 1, wherein the concave spherical mirror is constituted in a form of a shutter by connecting spherical mirror members, with long axes thereof extending in a horizontal direction, in a manner of a rosary and in a direction corresponding to short axes of the concave spherical mirror members. ### Claim 9 (depends on 8) The single crystal production apparatus according to claim 8, wherein the shutter is configured to be raised or lowered such that the range through which the concave spherical mirror covers the opening of the spheroidal mirror varies. ### Claim 10 (depends on 1) The single crystal production apparatus according to claim 1, wherein the range, through which the concave spherical mirror covers the opening, is variable. ### Claim 11 (depends on 1) The single crystal production apparatus according to claim 1, wherein the location of the concave spherical mirror, relative to the opening of the spheroidal mirror, is variable.