# US 11,028,108 B2 · Method for producing dialkylaminosilane

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- Number: US 11,028,108 B2
- Document ID: US11028108B2
- Status: Granted
- Kind: B2
- Application number: 16/490,890
- Filed: 2017-11-16
- Published: 2020-04-23
- Granted: 2021-06-08
- Earliest claimed: 2017-03-10
- Assignees: Jnc Corporation
- Applicants: Jnc Corporation
- Inventors: Toru Tanaka
- Web page: https://patentgrep.com/patent/US11028108B2

## CPC

- C07F 7/10: containing nitrogen {having a Si-N linkage}
- C07F: ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM (metal-containing porphyrins C07D487/22)

## Abstract

A method for safely and efficiently producing high-purity dialkylaminosilane. Dialkylamine is fed simultaneously during feeding chlorosilane in the presence of metal to cause reaction. For example, chlorosilane and dialkylamine are fed, and then only dialkylamine is fed to cause reaction, whereby dialkylaminosilane is produced.

## Claims

### Claim 1

A method for producing dialkylaminosilane, wherein dialkylamine is fed simultaneously during feeding chlorosilane in the presence of metal to cause reaction in a batch reactor wherein the metal to be added is magnesium.

### Claim 2 (depends on 1)

The method for producing dialkylaminosilane according to claim 1, wherein chlorosilane and dialkylamine are fed, and then only dialkylamine is fed to cause reaction.

### Claim 3 (depends on 1)

The method for producing dialkylaminosilane according to claim 1, wherein dialkylamine is represented by a chemical formula:
wherein R1 and R2 are independently straight-chain alkyl having 1 to 6 carbons, branched alkyl having 3 to 6 carbons or phenyl.

### Claim 4 (depends on 1)

The method for producing dialkylaminosilane according to claim 1, wherein chlorosilane is represented by a chemical formula:
R3n—Si—Cl(4-n)
wherein R3 is hydrogen, straight-chain alkyl having 1 to 6 carbons, branched alkyl having 3 to 6 carbons or phenyl, and n is an integer from 0 to 3.

### Claim 5 (depends on 1)

The method for producing dialkylaminosilane according to claim 1, wherein a temperature of reaction is 70° C. or higher and equal to or lower than a boiling point of a solvent used for the reaction.