# US 11,028,010 B2 · Machining of fusion-drawn glass laminate structures containing a photomachinable layer > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,028,010 B2 - Document ID: US11028010B2 - Status: Granted - Kind: B2 - Application number: 16/253,563 - Filed: 2019-01-22 - Published: 2019-05-23 - Granted: 2021-06-08 - Earliest claimed: 2013-02-28 - Assignees: Corning Incorporated - Applicants: Corning Incorporated - Inventors: Heather Debra Boek; Glen Bennett Cook; Victoria Ann Edwards; Mark Owen Weller - Web page: https://patentgrep.com/patent/US11028010B2 ## CPC - C03C 15/00: Surface treatment of glass, not in the form of fibres or filaments, by etching (etching or surface-brightening compositions, in general C09K13/00) - B32B 3/266: {characterised by an apertured layer, the apertures going through the whole thickness of the layer, e.g. expanded metal, perforated layer, slit layer regular cells B32B3/12} - B32B 17/06: comprising glass as the main or only constituent of a layer, next to another layer of a specific {material} - C03B 17/02: Forming {molten} glass coated with coloured layers; {Forming molten glass of different compositions or layers; Forming molten glass comprising reinforcements or inserts} - C03B 17/064: {by the overflow downdraw fusion process; Isopipes therefor} - C03C 3/091: containing aluminium - C03C 3/093: containing zinc or zirconium - C03C 3/095: containing rare earths - C03C 21/002: {to perform ion-exchange between alkali ions (C03C21/005 takes precedence)} - C03C 23/002: {by ultraviolet light} - C03C 23/007: {by thermal treatment} - G03F 7/0043: {Chalcogenides; Silicon, germanium, arsenic or derivatives thereof; Metals, oxides or alloys thereof (G03F7/0044 takes precedence)} - G03F 7/0757: {Macromolecular compounds containing Si-O, Si-C or Si-N bonds (G03F7/0752 takes precedence)} - G03F 7/38: Treatment before imagewise removal, e.g. prebaking {(G03F7/265 takes precedence)} - B32B 2307/704: Crystalline - B32B 2457/00: Electrical equipment - C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS - B32B: LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM - C03B: MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract Methods for machining glass structures may be performed on fusion-drawn glass laminates having a core layer interposed between a first cladding layer and a second cladding layer. The core layer may be formed from a core glass composition having a core photosensitivity, the first cladding layer may be formed from a glass composition having a photosensitivity different from the core photosensitivity, and the second cladding layer may be formed from a glass composition having a photosensitivity different from the core photosensitivity. At least one of the core layer, the first cladding layer, and the second cladding layer is a photomachinable layer. The methods may include exposing a selected region of a photomachinable layer in the fusion-drawn laminate to ultraviolet radiation; heating the glass structure until the selected region crystallizes; and removing the crystallized material selectively from the photomachinable layer. ## Claims ### Claim 1 A glass structure comprising: a first cladding layer formed from a first-clad glass composition having a first-clad photosensitivity; a second cladding layer formed from a second-clad glass composition having a second-clad photosensitivity; and a core layer interposed between the first cladding layer and the second cladding layer and formed from a core glass composition, wherein: the first cladding layer and the second cladding layer are photomachinable; the first cladding layer is fused to a first surface of the core layer with a diffusive layer formed between the first cladding layer and the core layer; the second cladding layer is fused to a second surface of the core layer with a diffusive layer formed between the second cladding layer and the core layer; and at least one of the first cladding layer or the second cladding layer comprises an ion exchanged region. ### Claim 2 (depends on 1) The glass structure of claim 1, wherein each of the first cladding layer and the second cladding layer is thinner than the core layer. ### Claim 3 (depends on 1) The glass structure of claim 1, wherein the core layer is at least partially transparent to ultraviolet (UV) radiation such that, upon exposure of the core layer to the UV radiation, the UV radiation penetrates into or through the core layer. ### Claim 4 (depends on 1) The glass structure of claim 1, wherein at least one of the first cladding layer or the second cladding layer comprises a hole structure. ### Claim 5 (depends on 1) The glass structure of claim 1, wherein each of the first cladding layer and the second cladding layer comprises a hole structure, and the core layer comprises a via connecting the hole structure of the first cladding layer and the hole structure of the second cladding layer. ### Claim 6 (depends on 1) The glass layer of claim 1, wherein all portions of the at least one of the first cladding layer or the second cladding layer are ion exchanged. ### Claim 7 (depends on 1) The glass structure of claim 1, wherein at least one of the first cladding layer or the second cladding layer comprises a hole structure, and the core layer comprises an ion exchanged region near the hole structure. ### Claim 8 (depends on 7) The glass structure of claim 7, wherein the ion exchanged region extends through an entire depth of the core layer. ### Claim 9 (depends on 1) The glass structure of claim 1, wherein: the core photosensitivity is greater than at least one of the first-clad photosensitivity or the second-clad photosensitivity; the core layer comprises a hollow chamber; and at least one of the first clad layer or the second clad layer comprises a hole structure in communication with the hollow chamber. ### Claim 10 (depends on 9) The glass structure of claim 9, wherein the at least one of the first clad layer or the second clad layer has an etch rate in an etchant that is at least 1.5 times greater than an etch rate of the core layer in the etchant. ### Claim 11 (depends on 9) A fluidic component comprising the glass structure of claim 9. ### Claim 12 (depends on 1) The glass structure of claim 1, wherein: the core photosensitivity is less than at least one of the first-clad photosensitivity or the second-clad photosensitivity; the first cladding layer comprises a hole structure; the second cladding layer comprises a hole structure; the core layer comprises a crystallized region connecting the hole structure of the first cladding layer and the hole structure of the second cladding layer; and the crystallized region of the core layer is narrower than the hole structure of the first cladding layer and the hole structure of the second cladding layer. ### Claim 13 (depends on 1) The glass structure of claim 1, wherein: the core photosensitivity is less than at least one of the first-clad photosensitivity or the second-clad photosensitivity; the first cladding layer comprises a hole structure; the second cladding layer comprises a hole structure; the core layer comprises a via connecting the hole structure of the first cladding layer and the hole structure of the second cladding layer; and the via of the core layer is narrower than the hole structure of the first cladding layer and the hole structure of the second cladding layer. ### Claim 14 A glass structure comprising: a first cladding layer formed from a first-clad glass composition having a first-clad photosensitivity; a second cladding layer formed from a second-clad glass composition having a second-clad photosensitivity; and a core layer interposed between the first cladding layer and the second cladding layer and formed from a core glass composition, wherein: the first cladding layer and the second cladding layer are photomachinable; the core layer is transparent to ultraviolet (UV) radiation such that, upon exposure of the core layer to the UV radiation, the UV radiation penetrates through the core layer; and at least one of the first cladding layer or the second cladding layer comprises an ion exchanged region. ### Claim 15 (depends on 14) The glass structure of claim 14, wherein each of the first cladding layer and the second cladding layer comprise a hole structure, and the core layer comprises a via connecting the hole structure of the first cladding layer and the hole structure of the second cladding layer. ### Claim 16 (depends on 14) The glass structure of claim 14, wherein at least one of the first cladding layer or the second cladding layer comprises a hole structure, and the core layer comprises an ion exchanged region near the hole structure. ### Claim 17 A glass structure comprising: a first cladding layer formed from a first-clad glass composition having a first-clad photosensitivity; a second cladding layer formed from a second-clad glass composition having a second-clad photosensitivity; and a core layer interposed between the first cladding layer and the second cladding layer and formed from a core glass composition having a core photosensitivity, wherein: the first cladding layer and the second cladding layer are photomachinable; the first cladding layer is fused to a first surface of the core layer with a diffusive layer formed between the first cladding layer and the core layer; the second cladding layer is fused to a second surface of the core layer with a diffusive layer formed between the second cladding layer and the core layer; the core photosensitivity is greater than at least one of the first-clad photosensitivity or the second-clad photosensitivity; and any one of the following: the core layer comprises a crystallized region and an uncrystallized region and at least one of the first clad layer or the second clad layer is uncrystallized; or the core layer comprises a void and at least one of the first clad layer or the second clad layer is uncrystallized. ### Claim 18 (depends on 17) A fluidic component comprising the glass structure of claim 17. ### Claim 19 A glass structure comprising: a first cladding layer formed from a first-clad glass composition having a first-clad photosensitivity; a second cladding layer formed from a second-clad glass composition having a second-clad photosensitivity; and a core layer interposed between the first cladding layer and the second cladding layer and formed from a core glass composition having a core photosensitivity, wherein: the first cladding layer and the second cladding layer are photomachinable; the first cladding layer is fused to a first surface of the core layer with a diffusive layer formed between the first cladding layer and the core layer; the second cladding layer is fused to a second surface of the core layer with a diffusive layer formed between the second cladding layer and the core layer; the core photosensitivity is less than at least one of the first-clad photosensitivity or the second-clad photosensitivity; the first cladding layer and the second cladding layer each comprises a hole structure; the core layer comprises a crystallized region connecting the hole structure of the first cladding layer and the hole structure of the second cladding layer; and the crystallized region is narrower than the hole structure of the first cladding layer and the hole structure of the second cladding layer. ### Claim 20 (depends on 19) A fluidic component comprising the glass structure of claim 19.