# US 11,027,979 B2 · Process for hydrogenating silicon tetrachloride

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- Number: US 11,027,979 B2
- Document ID: US11027979B2
- Status: Granted
- Kind: B2
- Application number: 16/463,242
- Filed: 2016-11-23
- Published: 2019-10-24
- Granted: 2021-06-08
- Earliest claimed: 2016-11-23
- Assignees: Wacker Chemie AG
- Applicants: Wacker Chemie AG
- Inventors: Martin Zettl; Andreas Hirschmann; Uwe Pätzold; Robert Ring
- Web page: https://patentgrep.com/patent/US11027979B2

## CPC

- C01B 33/1071: {Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof}
- C01B: NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; {METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C}

## Abstract

The invention relates to a process for hydrogenating silicon tetrachloride in a reactor, wherein a reactant gas containing hydrogen and silicon tetrachloride is heated to a temperature between 850° C. and 1600° C. by means of at least one heating element, which comprises a graphite surface, wherein the temperature of the heating element is between 850° C. and 1600° C. The process is characterized in that a nitrogen compound is added to the reactant gas in a substance amount fraction of 0.1 to 10% based on hydrogen.

## Claims

### Claim 1

A method for hydrogenating silicon tetrachloride in a reactor, comprising:
supplying a feed gas comprising hydrogen and silicon tetrachloride to a reactor and heating the feed gas to a temperature in the range from 850° C. to 1600° C. by employing at least one heating element comprising a graphite surface, the at least one heating element located within the reactor and in direct contact with the feed gas, the temperature of the heating element being in the range 850° C. to 1600° C., wherein nitrogen is added to the reactor in a molar proportion of from 0.1 to 10% based on hydrogen in the feed gas.

### Claim 2 (depends on 1)

The method of claim 1, wherein nitrogen is added in a molar proportion of from 0.5 to 5% based on hydrogen.

### Claim 3 (depends on 1)

The method of claim 1, wherein the temperature of the at least one heating element is from 850 to 1500° C.

### Claim 4 (depends on 1)

The method of claim 1, wherein the temperature of the feed gas in the reactor is from 850 to 1500° C.

### Claim 5 (depends on 1)

The method of claim 1, wherein the method is carried out at a pressure in the range from 2 to 18 bar.

### Claim 6 (depends on 1)

The method of claim 1, wherein silicon tetrachloride and hydrogen are present in a molar ratio of from 1:1.3 to 1:2.5.

### Claim 7 (depends on 1)

The method of claim 1, wherein the graphite surface of the at least one heating element is coated with silicon carbide.

### Claim 8 (depends on 1)

The method of claim 1, wherein a boron compound is additionally present in the reactor.

### Claim 9 (depends on 8)

The method of claim 8, wherein the boron compound is selected from the group consisting of diborane, higher boranes, boron-halogen compounds, borosilyl compounds and mixtures thereof.

### Claim 10 (depends on 9)

The method of claim 9, wherein the boron compound is added to the reactor in a molar proportion of from 0.1 ppmv to 100 ppmv based on the amount of feed gas.

### Claim 11 (depends on 1)

The method of claim 1, further comprising installing at least one heat exchanger comprising a graphite surface upstream and/or downstream of the at least one heating element.

### Claim 12 (depends on 1)

The method of claim 1, wherein nitrogen is introduced together with hydrogen into the reactor.

### Claim 13 (depends on 1)

The method of claim 1, wherein nitrogen is introduced together with silicon tetrachloride into the reactor.

### Claim 14 (depends on 1)

The method of claim 1, wherein the hydrogen of the feed gas includes nitrogen.

### Claim 15 (depends on 1)

The method of claim 1, wherein nitrogen is added in a molar proportion of from 1.5 to 3% based on hydrogen.

### Claim 16 (depends on 1)

The method of claim 1, wherein the temperature of the at least one heating element is from 900 to 1300° C.

### Claim 17 (depends on 1)

The method of claim 1, wherein the method is carried out at a pressure in the range from 4 to 16 bar.

### Claim 18 (depends on 1)

The method of claim 1, wherein silicon tetrachloride and hydrogen are present in a molar ratio of from 1:1.6 to 1:2.2.