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US 11,027,310 B2Granted
Fluid deposition apparatus and method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChun-Wen Cheng, Jung-Huei Peng, Yi-Shao Liu, Fei-Lung Lai, Shang-Ying Tsai
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Abstract
The present disclosure relates to a method of depositing a fluid onto a substrate. In some embodiments, the method may be performed by mounting a substrate to a micro-fluidic probe card, so that the substrate abuts a cavity within the micro-fluidic probe card that is in communication with a fluid inlet and a fluid outlet. A first fluidic chemical is selectively introduced into the cavity via the fluid inlet of the micro-fluidic probe card.
Claims20
A method of depositing a fluid, comprising:
- mounting a substrate that comprises a semiconductor substrate to a micro-fluidic probe card, so that the substrate abuts a cavity within the micro-fluidic probe card that is in communication with a fluid inlet and a fluid outlet and so that the semiconductor substrate extends laterally past opposing outermost sidewalls of the micro-fluidic probe card;
- and
- selectively introducing a first fluidic chemical to the cavity via the fluid inlet of the micro-fluidic probe card, wherein the fluid inlet and the fluid outlet are formed by interior sidewalls of the micro-fluidic probe card that are a same material, the interior sidewalls extending between an uppermost surface and a lower surface of the micro- fluidic probe card.
A method of depositing a fluid, comprising:
- forming one or more semiconductor devices along a surface of a substrate;
- bringing the surface of the substrate into contact with a cavity within a micro- fluidic probe card, wherein the micro-fluidic probe card comprises:
- a probe card body having sidewalls defining a fluid inlet and a fluid outlet that are in communication with the cavity;
- and
- a sealant element connected to the probe card body and laterally surrounding the cavity, wherein the sealant element has a topmost surface that contacts a bottommost surface of the probe card body and a bottommost surface that contacts an uppermost surface of the substrate, and wherein the uppermost surface of the substrate laterally extends past opposing outermost sidewalls of the sealant element in opposing directions;
- bringing a processing tool into contact with the probe card body along a first interface comprising the uppermost surface of the probe card body and along a second interface comprising the uppermost surface of the probe card body, wherein the first interface surrounds the fluid inlet and the second interface surrounds the fluid outlet;
- selectively introducing a fluidic chemical from the processing tool to the cavity via the fluid inlet of the micro-fluidic probe card;
- and
- dismounting the micro-fluidic probe card from the substrate.
6 more elements
A method of depositing a fluid, comprising:
- aligning an area of a substrate having one or more devices with a cavity within a micro-fluidic probe card, wherein the cavity is in communication with a fluid inlet and a fluid outlet and wherein the micro-fluidic probe card has a topmost surface and a lower surface that both continuously extend between a first sidewall of the micro-fluidic probe card defining the fluid inlet and a second sidewall of the micro-fluidic probe card defining the fluid outlet;
- bringing the substrate into contact with the micro-fluidic probe card along an interface comprising a polymer sealant, wherein the polymer sealant hermetically seals the cavity between the micro-fluidic probe card and the substrate;
- introducing the fluid to the cavity via the fluid inlet;
- removing the fluid from the cavity via the fluid outlet;
- dismounting the micro-fluidic probe card from the substrate after removing the fluid from the cavity;
- and
- checking to determine if the fluid has been deposited onto the substrate prior to dismounting the micro-fluidic probe card from the substrate.
4 more elements
Dependencies are inferred from the claim text.