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US 11,025,175 B1Granted
Planarization layers for nanovoided polymers
AssigneeFacebook Technologies, LLC
InventorsRenate Eva Klementine Landig, Kenneth Diest, Spencer Allan Wells, Andrew John Ouderkirk, Sheng Ye
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Abstract
In some examples, a device includes a nanovoided polymer element, a planarization layer disposed on a surface of the nanovoided polymer element, a first electrode disposed on the planarization layer, and a second electrode. The nanovoided polymer element may be located at least in part between the first electrode and the second electrode. The planarization layer may be located between the nanovoided polymer element and the first electrode.
Claims15
A device, comprising:
- a nanovoided polymer element;
- a planarization layer, disposed on a surface of the nanovoided polymer element;
- a first electrode disposed on the planarization layer;
- and
- a second electrode,
- wherein:
- the nanovoided polymer element is located at least in part between the first electrode and the second electrode,
- the planarization layer is located between the nanovoided polymer element and the first electrode, and
- the planarization layer has a layer thickness of between 50 nm and 500 nm, and seals the surface of the nanovoided polymer element.
6 more elements
A device, comprising:
- a nanovoided polymer element;
- a planarization layer, disposed on a surface of the nanovoided polymer element;
- a first electrode disposed on the planarization layer;
- a second electrode;
- and
- a control circuit configured to apply an electrical signal between the first electrode and the second electrode,
- wherein:
- the nanovoided polymer element is located at least in part between the first electrode and the second electrode,
- the planarization layer is located between the nanovoided polymer element and the first electrode,
- application of the electrical signal between the first electrode and the second electrode induces a deformation of the nanovoided polymer element,
- the planarization layer has a layer thickness of between 50 nm and 500 nm, and seals the surface of the nanovoided polymer element.
8 more elements
Dependencies are inferred from the claim text.