Nonvolatile memory device including two-dimensional material and apparatus including the nonvolatile memory device
AssigneeSamsung Electronics Co., Ltd.
InventorsJaeho Lee, Haeryong Kim, Sanghyun Jo, Hyeonjin Shin
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Abstract
Provided are nonvolatile memory devices including 2-dimensional (2D) material and apparatuses including the nonvolatile memory devices. A nonvolatile memory device may include a storage stack including a plurality of charge storage layers between a channel element and a gate electrode facing the channel element. The plurality of charge storage layers may include a 2D material. An interlayer barrier layer may be further provided between the plurality of charge storage layers. The nonvolatile memory device may have a multi-bit or multi-level memory characteristic due to the plurality of charge storage layers.
Claims23
A nonvolatile memory device comprising:
- a channel element;
- a source and a drain electrically each connected to the channel element. the source and the drain being spaced apart from each other;
- a gate electrode facing the channel element;
- a storage stack between the channel element and the gate electrode,
- the storage stack including a plurality of charge storage layers spaced apart from each other from the channel element towards the gate electrode,
- each of the plurality of charge storage layers including a 2-dimensional (2D) material;
- and
- a channel barrier layer between the channel element and the storage stack,
- wherein
- the nonvolatile memory device is configured to have a multi-bit memory characteristic due to the plurality of charge storage layers,
- the storage stack further includes a plurality of interlayer barrier layers alternately provided between the plurality of charge storage layers such that,
- each corresponding interlayer barrier layer among the plurality of interlayer barrier layers is between two adjacent charge storage layers among the plurality of charge storage layers, and
- each corresponding charge storage layer among the plurality of charge storage layers is between two adjacent interlayer barrier layers among the plurality of interlayer barrier layers,
- the plurality of interlayer barrier layers comprise a material having an energy band gap,
- the plurality of interlayer barrier layers include a 2D semiconductor or a 2D insulator, and
- thicknesses of the plurality of interlayer barrier layers decrease from the channel element towards the gate electrode,
- wherein thicknesses of the plurality of charge storage layers increase from the channel element towards the gate electrode.
Dependencies are inferred from the claim text.