US 11,024,482 B2 · Holography reconstruction method and program

Abstract

A lensless Fourier transform holography high accuracy reconstruction method using a charged particle beam apparatus which holds a sample on a diffraction surface of a diffraction grating provided on the downstream side of a traveling direction of the charged particle beam and which is formed of a material having permeability. The charged particle beam passed through the diffraction surface is image-formed, and the formed image is detected. An opening region of the diffraction grating is smaller than an irradiation region of the charged particle beam on the diffraction grating. Image data is obtained in a state where the irradiation region of the charged particle beam diffracted with the diffraction grating is within the irradiation region of the charged particle beam transmitted through the diffraction grating. Plural holograms obtained based on the image data are Fourier transformed and an intensity distribution image is displayed and stored.

Claims15

Dependent claims

A holography reconstruction method comprising:

irradiating a sample on a diffraction surface of a diffraction grating with a charged particle beam;
making an opening region of the diffraction grating smaller than an irradiation region of the charged particle beam to the diffraction grating, with the irradiation region of the charged particle beam diffracted with the diffraction grating being within the irradiation region of the charged particle beam transmitted through the diffraction grating;
detecting an image formed using the charged particle beam passed through the diffraction surface;
selecting at least one of a plurality of holograms obtained based on image data associated with the detected image;
and
performing a Fourier transform on the selected hologram,
wherein the diffraction grating is formed of a material having permeability with respect to the charged particle beam.

4 more elements

A non-transitory computer readable medium upon which is embodied a sequence of programmed instructions for holography reconstruction which, when executed by a processor to process image data

cause the processor to perform operations comprising:
irradiate a sample on a diffraction surface of a diffraction grating with a charged particle beam;
make an opening region of the diffraction grating smaller than an irradiation region of the charged particle beam to the diffraction grating, with the irradiation region of the charged particle beam diffracted with the diffraction grating being within the irradiation region of the charged particle beam transmitted through the diffraction grating;
detect an image formed using the charged particle beam passed through the diffraction surface;
select at least one of a plurality of holograms obtained based on image data associated with the detected image;
and
perform a Fourier transform on the selected hologram,
wherein the diffraction grating is formed of a material having permeability with respect to the charged particle beam.

5 more elements

Dependencies are inferred from the claim text.

Holography reconstruction method and program

Life of this patent

Holography reconstruction method and program

Life of this patent

Abstract

Claims15