Compound and composition for forming organic film
AssigneesShin-Etsu Chemical Co., Ltd., International Business Machines Corporation
InventorsSeiichiro Tachibana, Takeru Watanabe, Keisuke Niida, Hiroko Nagai, Takashi Sawamura, Tsutomu Ogihara, Alexander Edward Hess, Gregory Breyta, Daniel Paul Sanders, Rudy J. Wojtecki
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