Method and apparatus for pulling a single crystal by the FZ method
AssigneeSiltronic AG
InventorThomas Schroeck
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AssigneeSiltronic AG
InventorThomas Schroeck
Estimating the term…
FZ single crystals are pulled by melting a polycrystal with electromagnetic melting apparatus and then recrystallizing. First, a lower end of the polycrystal is melted; second, a monocrystalline seed is attached to the lower end of the polycrystal and melted beginning from an upper end thereof; third, between a lower section of the seed and the polycrystal, a thin neck is formed whose diameter (dD) is smaller than that (dI) of the seed; and fourth, between the thin neck section and the polycrystal, a conical section is formed. Before the conical growth, a switchover position (h′) of the polycrystal, the position at which the rate of polycrystal movement relative to the melting apparatus is to be reduced is determined, and the rate is reduced, in amount when the switchover position (h′) is reached.
A method for pulling a single crystal by the FZ method, in which a polycrystal having a conical section at its lower end is melted by means of an electromagnetic melting apparatus and then recrystallized, comprising:
Dependencies are inferred from the claim text.