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US 11,018,018 B2Granted
Superstrate and methods of using the same
AssigneeCanon Kabushiki Kaisha
InventorOzkan Ozturk
Life of this patent
Estimating the term…
Abstract
An apparatus may include a superstrate. The superstrate can include a body having a diameter. The body may fit within a projected square. The projected square may have a length equal to the diameter of the body. The body within the projected square may produce an open area between an exterior edge of the body and the projected square. The superstrate may further include a first projection extending from the exterior edge of the body within the open area.
Claims20
A superstrate comprising:
- a body having a diameter, wherein the body fits within a projected square, wherein the projected square has a length equal to the diameter of the body;
- and
- a first projection extending from the body within the projected square.
A method of forming a planarization layer, comprising:
- depositing a formable material on a substrate;
- contacting a superstrate with the formable material on the substrate;
- and
- separating the superstrate and the formable material on the substrate,
- the superstrate comprising:
- a body having a diameter, wherein the body fits within a projected square, wherein the projected square has a length equal to the diameter of the body;
- and
- a first projection extending from the body within the projected square.
5 more elements
A method of manufacturing an article, comprising:
- depositing a formable material on a substrate;
- contacting a superstrate with the formable material on the substrate, the superstrate comprising:
- a body having a diameter, wherein the body fits within a projected square, wherein the projected square has a length equal to the diameter of the body;
- and
- a first projection extending from the body within the projected square;
- curing the formable material to form a planar layer;
- separating the superstrate and the formable material on the substrate;
- processing the substrate on which the planar layer has been formed;
- and
- manufacturing the article from the processed substrate.
7 more elements
Dependencies are inferred from the claim text.