Nanoelectromechanical devices with metal-to-metal contacts
OwnerKwame Amponsahinventor
Life of this patent
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Abstract
Nanoelectromechanical systems (NEMS) devices/switches and methods for implementing and fabricating the same with conducting contacts are provided. A nanoelectromechanical system (NEMS) switch can include a substrate; a source cantilever formed over the substrate and configured to move relative to the substrate; a drain electrode and at least one gate electrode formed over the substrate; wherein the source cantilever, drain and gate electrodes comprises a metal layer affixed to a support layer, at least a portion of the metal layer at the contact area extending past the support layer; and an interlayer sandwiched between the support layer and substrate.
Claims10
A nanoelectromechanical system (NEMS) switch comprising:
- a substrate;
- a source cantilever formed over the substrate and configured to move relative to the substrate;
- a drain electrode and at least one gate electrode formed over the substrate, wherein the source cantilever, the drain, and the at least one gate electrode comprises a metal layer;
- and
- an interlayer sandwiched between a support layer and the substrate, wherein the drain electrode is connected to the substrate via the interlayer.
A nanoelectromechanical system (NEMS) switch comprising:
- a substrate;
- a source cantilever formed over the substrate and configured to move relative to the substrate;
- a drain electrode and at least one gate electrode formed over the substrate, wherein the source cantilever, the drain, and the at least one gate electrode comprises a metal layer;
- and
- an interlayer sandwiched between a support layer and the substrate, wherein the source cantilever is connected to the substrate via the interlayer.
Dependencies are inferred from the claim text.